In this paper, we present a new closed-loop control method of dielectric charge for
contactless capacitive microelectromechanical systems. The method uses a feedback loop …

Electrical models for MEMS varactors including the effect of dielectric charging dynamics are
not available in commercial circuit simulators. In this paper a circuit model using lumped …

Dielectric charging of insulating films in micro-electromechanical systems (MEMS) has a
crucial effect on the operation of those devices. In our previous work we have shown the …

Modern CMOS integrated technologies integrate a variety of complex multi-physics
components which contribute a growing number of challenges in the circuit design. This …

Conductive reliability modelling of Capacitive MEMS appears to be a problem of extent
complexity due to the presence of the various components of which the system consists. In …