Microelectromechanical systems (MEMS) represents a technology that integrates
miniaturized mechanical and electromechanical components (ie, sensors and actuators) that …

Thin films at the micrometer and submicrometer scales exhibit mechanical properties that
are different than those of bulk polycrystals. Industrial application of these materials requires …

Recent research has led to a deeper understanding of the nature and consequences of
interactions of materials on an atomic scale. The results have resonated throughout the field …

The recent shift in focus from defense and government work to commercial wireless efforts
has caused the job of the typical microwave engineer to change dramatically. The modern …

Mechanical property evaluation of nanometer-sized structures is necessary to help design
reliable MEMS/NEMS devices. Most material properties are known to exhibit dependence …

Silicon (Si) microfabrication techniques, derived from the microelectronics industry, have
enabled the development and commercialization of microelectromechanical systems …

In the context of linear elasticity, a stress singularity of the type Knrδ (δ< 0) may exist at re-
entrant notch corners, with an intensity Kn. The magnitude of the intensity, referred to here …

New experimental techniques need to be developed to address fundamental materials
issues in MEMS. Experimental protocols developed for macroscale testing are not …

Experimental continuation encompasses a set of methods that combine control and
continuation to obtain the full bifurcation diagram of a nonlinear system experimentally …

Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several
mechanisms have been proposed to explain this surprising behavior although the issue …