Diamond-like carbon (DLC) films deposited by cathodic vacuum arc evaporation (CVAE)
have attracted worldwide interest from research groups and industry since the beginning of …

Wafer bonding techniques, which are very different from epitaxial growth techniques, can be
used not only for the fabrication of micro-electromechanical systems (MEMS), silicon on …

The coefficient of thermal expansion (CTE) of hydrogenated amorphous carbon (aC: H) was
investigated as a function of the concentration of sp 2 hybridization. The CTE, determined …

Young's modulus of free-standing polycrystalline Al, Au, and W films with submicron
thickness has been studied using a dynamic bulge-testing technique. For Au and Al films a …

Origami‐based techniques for creating 3D shapes from 2D patterns via folding have moved
from the domain of art to practical engineering. Flat sheets are an appealing starting material …

A method of measuring the Yong's modulus, Poisson ratio, and coefficient of thermal
expansion (CTE) is presented. The method uses a wafer curvature technique to measure …

Epitaxial growth of lead-free (K, Na) NbO 3 (KNN) thin films on (001) SrRuO 3/Pt/ZrO 2/Si
substrates was achieved by using RF magnetron sputtering. X-ray diffraction measurements …

Amorphous carbon with different structures was used as antireflective coating on crystalline
silicon solar cells. Polymeric-like carbon (PLC) and diamond-like carbon (DLC) were …

The CrN films were grown by rf-magnetron sputtering using a dynamic glancing angle
deposition technique. In this technique, the substrate oscillates in front of the sputtering …

This paper proposes a measuring apparatus and method for simultaneous determination of
the thermal expansion coefficient and biaxial Young's modulus of indium tin oxide (ITO) thin …