Microstructure and Pore Characteristics of a Double-Layered Pore Structure Powder Filter Fabricated by the WPS Process
MJ Lee, HJ Kim, DH Kang, JW Lee, JY Yun - Metals, 2024 - mdpi.com
In order to supply high-purity process gas in the semiconductor manufacturing process, a
gas filter is used to remove particles that may be contained in the gas. However, because …
gas filter is used to remove particles that may be contained in the gas. However, because …