Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications

P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021 - pubs.rsc.org
The past few decades have witnessed growing research interest in developing powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

Helium ion microscopy

G Hlawacek, V Veligura, R Van Gastel… - Journal of Vacuum …, 2014 - pubs.aip.org
Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution
microscopy and nanofabrication technique. It is an enabling technology that not only …

Roadmap for focused ion beam technologies

K Höflich, G Hobler, FI Allen, T Wirtz, G Rius… - Applied Physics …, 2023 - pubs.aip.org
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

Helium-ion-beam nanofabrication: extreme processes and applications

S He, R Tian, W Wu, WD Li… - International Journal of …, 2020 - iopscience.iop.org
Helium ion beam (HIB) technology plays an important role in the extreme fields of
nanofabrication. This paper reviews the latest developments in HIB technology as well as its …

[HTML][HTML] A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

FI Allen - Beilstein journal of nanotechnology, 2021 - beilstein-journals.org
The helium ion microscope has emerged as a multifaceted instrument enabling a broad
range of applications beyond imaging in which the finely focused helium ion beam is used …

Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

MG Stanford, BB Lewis, K Mahady… - Journal of Vacuum …, 2017 - pubs.aip.org
Focused ion beam nanoscale synthesis has emerged as a critical tool for selected area
nanofabrication. Helium and neon ion beams from the gas field ion source have recently …

[HTML][HTML] Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

H Wu, LA Stern, D Xia, D Ferranti, B Thompson… - Journal of Materials …, 2014 - Springer
Helium ion beam induced cobalt nanowire deposition using dicobalt octacarbonyl (Co 2
(CO) 8) as a precursor is described. 10 nm wide metal lines were fabricated with good …

[HTML][HTML] Helium focused ion beam induced subsurface damage on Si and SiC substrates: Experiments and generative deep neural network modeling via position …

Q Chen, MA Gosalvez, Q Li, Y Xing - Journal of Materials Research and …, 2023 - Elsevier
Deep neural networks (DNNs) are reshaping many fields due to their end-to-end ability to
learn directly from data, leading to outstanding performance, especially in image processing …

Focused ion beam induced processing

P Orús, R Córdoba, JM De Teresa - … techniques and their …, 2020 - iopscience.iop.org
Focused ion beam (FIB) technology makes use of a highly-focused beam of charged ions to
perform precise nanopatterning tasks by steering it over a sample, tracing patterns defined …

Focused helium-ion-beam-induced deposition

PFA Alkemade, H Miro - Applied Physics A, 2014 - Springer
The recent introduction of the helium ion microscope (HIM) offers new possibilities for
materials modification and fabrication with spatial resolution below 10 nm. In particular, the …