Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications
P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021 - pubs.rsc.org
The past few decades have witnessed growing research interest in developing powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …
Helium ion microscopy
G Hlawacek, V Veligura, R Van Gastel… - Journal of Vacuum …, 2014 - pubs.aip.org
Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution
microscopy and nanofabrication technique. It is an enabling technology that not only …
microscopy and nanofabrication technique. It is an enabling technology that not only …
Roadmap for focused ion beam technologies
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …
Helium-ion-beam nanofabrication: extreme processes and applications
Helium ion beam (HIB) technology plays an important role in the extreme fields of
nanofabrication. This paper reviews the latest developments in HIB technology as well as its …
nanofabrication. This paper reviews the latest developments in HIB technology as well as its …
[HTML][HTML] A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope
FI Allen - Beilstein journal of nanotechnology, 2021 - beilstein-journals.org
The helium ion microscope has emerged as a multifaceted instrument enabling a broad
range of applications beyond imaging in which the finely focused helium ion beam is used …
range of applications beyond imaging in which the finely focused helium ion beam is used …
Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams
Focused ion beam nanoscale synthesis has emerged as a critical tool for selected area
nanofabrication. Helium and neon ion beams from the gas field ion source have recently …
nanofabrication. Helium and neon ion beams from the gas field ion source have recently …
[HTML][HTML] Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing
H Wu, LA Stern, D Xia, D Ferranti, B Thompson… - Journal of Materials …, 2014 - Springer
Helium ion beam induced cobalt nanowire deposition using dicobalt octacarbonyl (Co 2
(CO) 8) as a precursor is described. 10 nm wide metal lines were fabricated with good …
(CO) 8) as a precursor is described. 10 nm wide metal lines were fabricated with good …
[HTML][HTML] Helium focused ion beam induced subsurface damage on Si and SiC substrates: Experiments and generative deep neural network modeling via position …
Q Chen, MA Gosalvez, Q Li, Y Xing - Journal of Materials Research and …, 2023 - Elsevier
Deep neural networks (DNNs) are reshaping many fields due to their end-to-end ability to
learn directly from data, leading to outstanding performance, especially in image processing …
learn directly from data, leading to outstanding performance, especially in image processing …
Focused ion beam induced processing
P Orús, R Córdoba, JM De Teresa - … techniques and their …, 2020 - iopscience.iop.org
Focused ion beam (FIB) technology makes use of a highly-focused beam of charged ions to
perform precise nanopatterning tasks by steering it over a sample, tracing patterns defined …
perform precise nanopatterning tasks by steering it over a sample, tracing patterns defined …
Focused helium-ion-beam-induced deposition
PFA Alkemade, H Miro - Applied Physics A, 2014 - Springer
The recent introduction of the helium ion microscope (HIM) offers new possibilities for
materials modification and fabrication with spatial resolution below 10 nm. In particular, the …
materials modification and fabrication with spatial resolution below 10 nm. In particular, the …