AlN films deposited under various nitrogen concentrations by RF reactive sputtering

H Cheng, Y Sun, JX Zhang, YB Zhang, S Yuan… - Journal of crystal …, 2003 - Elsevier
Wurtzite AlN films were deposited by an RF reactive sputtering technique under various
nitrogen concentrations at low temperature (350° C). The evolution of preferred orientation …

The influence of deposition conditions on structure and morphology of aluminum nitride films deposited by radio frequency reactive sputtering

H Cheng, Y Sun, P Hing - Thin solid films, 2003 - Elsevier
Wurtzite aluminum nitride (2H–AlN) films were deposited on (100) silicon wafers by radio
frequency (RF) magnetron reactive sputtering under various deposition conditions. The …

Microstructure evolution of AlN films deposited under various pressures by RF reactive sputtering

H Cheng, Y Sun, P Hing - Surface and coatings technology, 2003 - Elsevier
Wurtzite AlN (2H-AlN) films were deposited on p-type Si (100) by RF planar magnetron
reactive sputtering under various pressures at a relatively low temperature (350° C). X-Ray …

TiC and TaC deposition by pulsed laser ablation: a comparative approach

R Teghil, L D'Alessio, M Zaccagnino, D Ferro… - Applied surface …, 2001 - Elsevier
Titanium and tantalum monocarbides have been evaporated by means of doubled Nd-YAG
laser and deposited on oriented silicon substrates. The gaseous phase and the deposited …

Local thermal equilibrium plasma modeling for analyses of gas-phase reactions during reactive-laser ablation

J Hermann, C Dutouquet - Journal of applied physics, 2002 - pubs.aip.org
Number densities of atoms, ions, and molecules in plasmas composed of two-element vapor-
gas mixtures have been computed assuming local thermal equilibrium. The calculations …

Femtosecond laser fabrication of stable hydrophilic and anti-corrosive steel surfaces

C Lanara, A Mimidis, E Stratakis - Materials, 2019 - mdpi.com
We report on a novel single-step method to develop steel surfaces with permanent highly
hydrophilic and anti-corrosive properties, without employing any chemical coating. It is …

Luminescence from pigments and resins for oil paintings induced by laser excitation

I Borgia, R Fantoni, C Flamini, TM Di Palma… - Applied surface …, 1998 - Elsevier
The present work reports results of an extensive study of laser induced luminescence by
tripled Nd: YAG laser (λ= 355 nm) of a few most common painting materials, namely, natural …

Laser-induced fluorescence probing during pulsed-laser ablation for three-dimensional number density mapping of plasma species

C Dutouquet, J Hermann - Journal of Physics D: Applied Physics, 2001 - iopscience.iop.org
Laser-induced fluorescence spectroscopy was employed to measure ground state number
densities of atoms and molecules in plasma plumes generated by pulsed-laser ablation of …

Analyses of gas-phase reactions during reactive laser ablation using emission spectroscopy

J Hermann, C Dutouquet - Journal of Physics D: Applied Physics, 1999 - iopscience.iop.org
Time-and space-resolved emission spectroscopic measurements have been performed to
investigate the formation of molecular species in the plasma plume generated by pulsed …

The evolution of preferred orientation and morphology of AlN films under various RF sputtering powers

H Cheng, P Hing - Surface and Coatings Technology, 2003 - Elsevier
Wurtzite AlN films were deposited by RF reactive sputtering technique in argon and nitrogen
gas mixtures. The evolution of preferred orientation and morphology of AlN films with the …