AlN films deposited under various nitrogen concentrations by RF reactive sputtering
H Cheng, Y Sun, JX Zhang, YB Zhang, S Yuan… - Journal of crystal …, 2003 - Elsevier
Wurtzite AlN films were deposited by an RF reactive sputtering technique under various
nitrogen concentrations at low temperature (350° C). The evolution of preferred orientation …
nitrogen concentrations at low temperature (350° C). The evolution of preferred orientation …
The influence of deposition conditions on structure and morphology of aluminum nitride films deposited by radio frequency reactive sputtering
Wurtzite aluminum nitride (2H–AlN) films were deposited on (100) silicon wafers by radio
frequency (RF) magnetron reactive sputtering under various deposition conditions. The …
frequency (RF) magnetron reactive sputtering under various deposition conditions. The …
Microstructure evolution of AlN films deposited under various pressures by RF reactive sputtering
Wurtzite AlN (2H-AlN) films were deposited on p-type Si (100) by RF planar magnetron
reactive sputtering under various pressures at a relatively low temperature (350° C). X-Ray …
reactive sputtering under various pressures at a relatively low temperature (350° C). X-Ray …
TiC and TaC deposition by pulsed laser ablation: a comparative approach
R Teghil, L D'Alessio, M Zaccagnino, D Ferro… - Applied surface …, 2001 - Elsevier
Titanium and tantalum monocarbides have been evaporated by means of doubled Nd-YAG
laser and deposited on oriented silicon substrates. The gaseous phase and the deposited …
laser and deposited on oriented silicon substrates. The gaseous phase and the deposited …
Local thermal equilibrium plasma modeling for analyses of gas-phase reactions during reactive-laser ablation
J Hermann, C Dutouquet - Journal of applied physics, 2002 - pubs.aip.org
Number densities of atoms, ions, and molecules in plasmas composed of two-element vapor-
gas mixtures have been computed assuming local thermal equilibrium. The calculations …
gas mixtures have been computed assuming local thermal equilibrium. The calculations …
Femtosecond laser fabrication of stable hydrophilic and anti-corrosive steel surfaces
We report on a novel single-step method to develop steel surfaces with permanent highly
hydrophilic and anti-corrosive properties, without employing any chemical coating. It is …
hydrophilic and anti-corrosive properties, without employing any chemical coating. It is …
Luminescence from pigments and resins for oil paintings induced by laser excitation
I Borgia, R Fantoni, C Flamini, TM Di Palma… - Applied surface …, 1998 - Elsevier
The present work reports results of an extensive study of laser induced luminescence by
tripled Nd: YAG laser (λ= 355 nm) of a few most common painting materials, namely, natural …
tripled Nd: YAG laser (λ= 355 nm) of a few most common painting materials, namely, natural …
Laser-induced fluorescence probing during pulsed-laser ablation for three-dimensional number density mapping of plasma species
C Dutouquet, J Hermann - Journal of Physics D: Applied Physics, 2001 - iopscience.iop.org
Laser-induced fluorescence spectroscopy was employed to measure ground state number
densities of atoms and molecules in plasma plumes generated by pulsed-laser ablation of …
densities of atoms and molecules in plasma plumes generated by pulsed-laser ablation of …
Analyses of gas-phase reactions during reactive laser ablation using emission spectroscopy
J Hermann, C Dutouquet - Journal of Physics D: Applied Physics, 1999 - iopscience.iop.org
Time-and space-resolved emission spectroscopic measurements have been performed to
investigate the formation of molecular species in the plasma plume generated by pulsed …
investigate the formation of molecular species in the plasma plume generated by pulsed …
The evolution of preferred orientation and morphology of AlN films under various RF sputtering powers
H Cheng, P Hing - Surface and Coatings Technology, 2003 - Elsevier
Wurtzite AlN films were deposited by RF reactive sputtering technique in argon and nitrogen
gas mixtures. The evolution of preferred orientation and morphology of AlN films with the …
gas mixtures. The evolution of preferred orientation and morphology of AlN films with the …