Microheater: material, design, fabrication, temperature control, and applications—a role in COVID-19
Heating plays a vital role in science, engineering, mining, and space, where heating can be
achieved via electrical, induction, infrared, or microwave radiation. For fast switching and …
achieved via electrical, induction, infrared, or microwave radiation. For fast switching and …
A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies
RG Spruit, JT Van Omme… - Journal of …, 2017 - ieeexplore.ieee.org
Microelectromechanical systems (MEMS)-based sample carriers became a breakthrough for
in situ inspection techniques, especially in transmission electron microscopy where the …
in situ inspection techniques, especially in transmission electron microscopy where the …
Fabrication and characterization of the micro-heater and temperature sensor for polyMUMPs-based MEMS gas sensor
This work describes the fabrication and characterization of a Micro-Electro-Mechanical
System (MEMS) sensor for gas sensing applications. The sensor is based on standard …
System (MEMS) sensor for gas sensing applications. The sensor is based on standard …
A microbridge heater for low power gas sensing based on the 3-Omega technique
S Kommandur, A Mahdavifar, PJ Hesketh… - Sensors and Actuators A …, 2015 - Elsevier
The 3-Omega measurement technique was applied to a microbridge heater for the purpose
of low power gas sensing. The sensor performance was evaluated for mixtures of CO 2, Ar …
of low power gas sensing. The sensor performance was evaluated for mixtures of CO 2, Ar …
[图书][B] MEMS and Nanotechnology for Gas sensors
S Roy, CK Sarkar - 2017 - books.google.com
How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand
for low-power, high-density gas sensor arrays that can overcome problems relative to high …
for low-power, high-density gas sensor arrays that can overcome problems relative to high …
Simulation and fabrication of an ultra-low power miniature microbridge thermal conductivity gas sensor
A Mahdavifar, R Aguilar, Z Peng… - Journal of The …, 2014 - iopscience.iop.org
A miniature, ultra-low power, sensitive, microbridge-based thermal conductivity gas sensor
has been developed. The batch fabrication of the sensors was realized by CMOS …
has been developed. The batch fabrication of the sensors was realized by CMOS …
A platinum cantilever-based thermal conductivity detector for ammonia sensing using the 3-omega technique
In this work, the effect of gap size on a TCD sensor performance was studied through a
comprehensive COMSOL model to test an optimal geometric design. The platinum …
comprehensive COMSOL model to test an optimal geometric design. The platinum …
Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement
KK Mistry, A Mahapatra - Microsystem technologies, 2012 - Springer
Thermo transfer type MEMS (Micro Electro Mechanical System) based micro flow sensing
device have promising potential to solve the limitation of implantable arterial blood flow rate …
device have promising potential to solve the limitation of implantable arterial blood flow rate …
[PDF][PDF] Design and analysis of micro-heaters using COMSOL multiphysics for MEMS based gas sensor
L Sujatha, VSSS Aravind, R Padamapriya… - Excerpt from the …, 2012 - comsol.it
Micro-Heaters have been the subject of great interest owing to their extensive applications in
gas sensors, humidity sensors and other micro-systems. A micro-heater should have low …
gas sensors, humidity sensors and other micro-systems. A micro-heater should have low …
In-situ TEM study from the perspective of holders
T Yaguchi, MLS Gabriel, A Hashimoto, JY Howe - Microscopy, 2024 - academic.oup.com
During the in situ transmission electron microscopy (TEM) observations, the diverse
functionalities of different specimen holders play a crucial role. We hereby provide a …
functionalities of different specimen holders play a crucial role. We hereby provide a …