Annealing influence on optical performance of HfO2 thin films
Hafnium oxides (HfO 2) retain mechanical resilience, thermal stability, and chemical
resistivity due to which it is used diversely in various high-tech applications in optics and …
resistivity due to which it is used diversely in various high-tech applications in optics and …
Microstructure, wettability, optical and electrical properties of HfO2 thin films: effect of oxygen partial pressure
J Gao, G He, B Deng, DQ Xiao, M Liu, P Jin… - Journal of Alloys and …, 2016 - Elsevier
The effect of oxygen partial pressure on the microstructure, wettability, optical and electrical
properties of sputtering-derived HfO 2 thin films has been systematically investigated by …
properties of sputtering-derived HfO 2 thin films has been systematically investigated by …
Highly sensitive and selective detection of dopamine using atomic layer deposited HfO2 ultra-thin films
DA Abraham, AD Li, A Sanmugam, MA Wadaan… - Electrochimica …, 2024 - Elsevier
The development of non-enzymatic and binder-free biosensors plays a vital role, and it
possesses main benefits for effective biomolecule recognition with high sensitivity and …
possesses main benefits for effective biomolecule recognition with high sensitivity and …
Structure and properties of Hf-ON films prepared by high-rate reactive HiPIMS with smoothly controlled composition
Hafnium oxynitride ceramics were prepared in the form of thin films by high-power impulse
magnetron sputtering of Hf in various Ar+ O 2+ N 2 gas mixtures. Smooth composition …
magnetron sputtering of Hf in various Ar+ O 2+ N 2 gas mixtures. Smooth composition …
Studies on RF magnetron sputtered HfO2 thin films for microelectronic applications
P Kondaiah, H Shaik, G Mohan Rao - Electronic Materials Letters, 2015 - Springer
We investigated the effect of oxygen flow rate during the reactive magnetron sputtering on
the compositional, structural, optical and electrical properties of HfO 2 films. We also studied …
the compositional, structural, optical and electrical properties of HfO 2 films. We also studied …
Simultaneously-doping of HfO2 thin films by Ni with sputtering technique and effect of post annealing on structural and electrical properties
This article reports a detailed structural and electrical characterization study of Ni: HfO 2
dielectrics grown by rf and dc sputtering and variations in the rapid thermal annealing …
dielectrics grown by rf and dc sputtering and variations in the rapid thermal annealing …
Reducing optical loss of dual-ion beam sputtered HfO2 films via optimization of coating and annealing parameters
C Ma, G Chen, J He, S Fang, C Wang, Q Cai… - Optics …, 2023 - opg.optica.org
HfO_2 films are widely used for optical coatings due to the high refractive index and low
absorption, especially in the ultraviolet (UV) band. In this work, HfO_2 film samples were …
absorption, especially in the ultraviolet (UV) band. In this work, HfO_2 film samples were …
Modulation of microstructure and optical properties of anti-reflection HfO2 films by sputtering power and O2/Ar flow ratio
Y Wu, J Yu, L Yang, W Wu, X Wang, M Tang, B Li… - Applied Physics B, 2023 - Springer
The laser-induced damage threshold (LIDT) of optical thin films is one of the major
constraints in development of high repetition rate femtosecond laser systems. In this work …
constraints in development of high repetition rate femtosecond laser systems. In this work …
Optimizing HiPIMS pressure for deposition of high-k (k= 18.3) amorphous HfO2
Stoichiometric amorphous HfO 2 films have been deposited by reactive High Power Impulse
Magnetron Sputtering (HiPIMS) from a Hf target in a 1: 1 Ar: O 2 atmosphere at pressures 2 …
Magnetron Sputtering (HiPIMS) from a Hf target in a 1: 1 Ar: O 2 atmosphere at pressures 2 …
Analysis of structural, optical, and aquaphobic properties of zirconium oxide nanofilms by varying sputtering gas
K Sujit, D Vikramaditya, KV Velmurugan… - … in Materials Science …, 2022 - Wiley Online Library
The problem of contamination in ceramic insulators was found to be frequent in power
transmission lines and transformers. The key aim was to develop aquaphobic zirconium …
transmission lines and transformers. The key aim was to develop aquaphobic zirconium …