MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra, S Agarwal - Micromachines, 2024 - mdpi.com
Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in
the realm of miniature electronic devices, promising unprecedented advancements in size …

An active heat-based restoring mechanism for improving the reliability of RF-MEMS switches

J Iannacci, A Faes, A Repchankova, A Tazzoli… - Microelectronics …, 2011 - Elsevier
We propose an active mechanism to retrieve the functionality of RF-MEMS ohmic switches
after stiction occurs. The mechanism exploits a micro-heater, embedded within the switch …

Experimental validation of mixed electromechanical and electromagnetic modeling of RF-MEMS devices within a standard IC simulation environment

J Iannacci, R Gaddi, A Gnudi - Journal of …, 2010 - ieeexplore.ieee.org
The validity and applicability of a high-level simulation approach of radio-frequency
microelectromechanical-system (RF-MEMS) devices, based on a library of analytical …

On the modeling of dielectric charging in RF-MEMS capacitive switches

G Papaioannou, F Coccetti… - 2010 Topical Meeting on …, 2010 - ieeexplore.ieee.org
The dielectric charging in RF MEMS capacitive switches is modeled. The modeling focus on
charge injections processes and the calculations start from first principles. The calculations …

Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism

J Iannacci, A Repchankova, A Faes, A Tazzoli… - Microelectronics …, 2010 - Elsevier
MicroElectroMechanical Systems for Radio Frequency applications (ie RF-MEMS) show
very good performance and characteristics. However, their employment within large-scale …

Dynamic actuation methods for capacitive MEMS shunt switches

ME Khater, K Vummidi… - Journal of …, 2011 - iopscience.iop.org
We develop dynamic actuation methods for capacitive MEMS shunt switches. We show that
the dynamic actuation voltage is significantly less than the static actuation voltage and …

Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches

A Belarni, M Lamhamdi, P Pons, L Boudou… - Microelectronics …, 2008 - Elsevier
In this work, we investigate the charging and reliability of interlayer dielectric materials that
are used in the fabrication process of advanced RF-MEMS switches. In particular, the charge …

Reconfigurable 4 pole bandstop filter based on RF-MEMS-loaded split ring resonators

D Bouyge, A Crunteanu, A Pothier… - 2010 IEEE MTT-S …, 2010 - ieeexplore.ieee.org
A reconfigurable four-pole bandstop filter based on the combination of the split ring
resonators (SRRs) and RFMEMS switches, operative at the X frequency band, is presented …

Reconfigurable split rings based on MEMS switches and their application to tunable filters

D Bouyge, A Crunteanu, M Durán-Sindreu… - Journal of …, 2012 - iopscience.iop.org
It is shown that radiofrequency micro-electromechanical-system (RF-MEMS) switches are
useful to implement electronically reconfigurable split ring resonators (SRRs). Three …

Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on Properties

L Wang, JY Tang, QA Huang - Journal of …, 2013 - ieeexplore.ieee.org
A capacitance-voltage (CV) model is developed for RF microelectromechanical systems
(MEMS) switches at upstate and downstate. The transient capacitance response of the RF …