[HTML][HTML] Status and prospects of plasma-assisted atomic layer deposition
Processing at the atomic scale is becoming increasingly critical for state-of-the-art electronic
devices for computing and data storage, but also for emerging technologies such as related …
devices for computing and data storage, but also for emerging technologies such as related …
Efforts of implementing ultra‐flexible thin‐film encapsulation for optoelectronic devices based on atomic layer deposition technology
G Wang, Y Duan - SmartMat, 2024 - Wiley Online Library
Flexible, wearable electronics are the future of electronics. Although organic photovoltaic
devices have the advantages of high efficiency, low cost, and flexibility, they face the …
devices have the advantages of high efficiency, low cost, and flexibility, they face the …
Investigation and review of the thermal, mechanical, electrical, optical, and structural properties of atomic layer deposited high-k dielectrics: Beryllium oxide, aluminum …
JT Gaskins, PE Hopkins, DR Merrill… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Atomic layer deposited (ALD) high-dielectric-constant (high-k) materials have found
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …
Foundations of atomic-level plasma processing in nanoelectronics
K Arts, S Hamaguchi, T Ito, K Karahashi… - Plasma Sources …, 2022 - iopscience.iop.org
This article discusses key elementary surface-reaction processes in state-of-the-art plasma
etching and deposition relevant to nanoelectronic device fabrication and presents a concise …
etching and deposition relevant to nanoelectronic device fabrication and presents a concise …
Antireflection coatings for strongly curved glass lenses by atomic layer deposition
K Pfeiffer, U Schulz, A Tünnermann, A Szeghalmi - Coatings, 2017 - mdpi.com
Antireflection (AR) coatings are indispensable in numerous optical applications and are
increasingly demanded on highly curved optical components. In this work, optical thin films …
increasingly demanded on highly curved optical components. In this work, optical thin films …
A nanoscale inorganic coating strategy for stabilizing hydrogel neural probes in vivo
Hydrogels with adaptable optical and mechanical characteristics show considerable
promise for light delivery in vivo with neuroengineering applications. However, the unlinked …
promise for light delivery in vivo with neuroengineering applications. However, the unlinked …
Remarkably stable high mobility self-aligned oxide TFT by investigating the effect of oxygen plasma time during PEALD of SiO2 gate insulator
Oxide thin-film transistors (TFTs) should be manufactured with high mobility and stability
based on a self-aligned top-gate structure to drive high-end displays. In this study, the effect …
based on a self-aligned top-gate structure to drive high-end displays. In this study, the effect …
Comparative study of ALD SiO2 thin films for optical applications
K Pfeiffer, S Shestaeva, A Bingel, P Munzert… - Optical Materials …, 2016 - opg.optica.org
We have investigated the suitability of atomic layer deposition (ALD) for SiO_2 optical
coatings and applied it to broadband antireflective multilayers in combination with HfO_2 as …
coatings and applied it to broadband antireflective multilayers in combination with HfO_2 as …
High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays
Exciting concepts are under development for flagship, probe class, explorer class, and
suborbital class NASA missions in the ultraviolet/optical spectral range. These missions will …
suborbital class NASA missions in the ultraviolet/optical spectral range. These missions will …
Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design
This work develops a first-principles-based three-dimensional, multiscale computational
fluid dynamics (CFD) model, together with reactor geometry optimizations, of SiO 2 thin-film …
fluid dynamics (CFD) model, together with reactor geometry optimizations, of SiO 2 thin-film …