Design and applications of MEMS flow sensors: A review
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …
industrial and environmental applications. Besides the critical demands on sensing range of …
A review of principles of MEMS pressure sensing with its aerospace applications
Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …
research, requires critical and accurate measurement techniques. With the advancements in …
Small-size temperature/high-pressure integrated sensor via flip-chip method
M Huang, X Wu, L Zhao, X Han, Y Xia, Y Gao… - Microsystems & …, 2024 - nature.com
Hydraulic technology with smaller sizes and higher reliability trends, including fault
prediction and intelligent control, requires high-performance temperature and pressure …
prediction and intelligent control, requires high-performance temperature and pressure …
MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …
have gained significant attention due to their miniaturization, high performance, and diverse …
A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With 6 m/s Linear Range
This article presents a complementary metal-oxide semiconductor (CMOS)-
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …
Fully integrated bidirectional CMOS-MEMS flow sensor with low power pulse operation
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas …
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas …
An SOI-structured piezoresistive differential pressure sensor with high performance
Z Xu, J Yan, M Ji, Y Zhou, D Wang, Y Wang, Z Mai… - Micromachines, 2022 - mdpi.com
This paper presents a piezoresistive differential pressure sensor based on a silicon-on-
insulator (SOI) structure for low pressure detection from 0 to 30 kPa. In the design phase, the …
insulator (SOI) structure for low pressure detection from 0 to 30 kPa. In the design phase, the …
Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNCs film
Featured Application The thermoelectric microgenerators converted waste heat to electrical
power and thus have a potential for application in electronic devices and microsensors …
power and thus have a potential for application in electronic devices and microsensors …
An integrated CMOS MEMS gas flow sensor with detection limit towards micrometer per second
We report an integrated Thermoresistive Micro Calorimetric Flow (TMCF) sensor with the
detection limit towards μm/s level by using proprietary InvenSense CMOS MEMS …
detection limit towards μm/s level by using proprietary InvenSense CMOS MEMS …
Key processes of silicon-on-glass MEMS fabrication technology for gyroscope application
Z Ma, Y Wang, Q Shen, H Zhang, X Guo - Sensors, 2018 - mdpi.com
MEMS fabrication that is based on the silicon-on-glass (SOG) process requires many steps,
including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical …
including patterning, anodic bonding, deep reactive ion etching (DRIE), and chemical …