Atomic layer deposition of metals: Precursors and film growth

DJ Hagen, ME Pemble, M Karppinen - Applied Physics Reviews, 2019 - pubs.aip.org
The coating of complex three-dimensional structures with ultrathin metal films is of great
interest for current technical applications, particularly in microelectronics, as well as for basic …

Copper (I), silver (I) and gold (I) carboxylate complexes as precursors in chemical vapour deposition of thin metallic films

A Grodzicki, I Łakomska, P Piszczek… - Coordination Chemistry …, 2005 - Elsevier
Volatile precursors of copper, silver and gold for chemical vapour deposition (CVD) of
metallic layers are described. There is considerable research interest in CVD because it …

[图书][B] Gold nanoparticles for physics, chemistry and biology

C Louis, O Pluchery - 2017 - books.google.com
Gold Nanoparticles for Physics, Chemistry and Biology offers an overview of recent research
into gold nanoparticles, covering their discovery, usage and contemporary practical …

Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triorganophosphine adducts of silver carboxylates, including the structure of [Ag (O2CC3F7) …

DA Edwards, RM Harker, MF Mahon, KC Molloy - Inorganica Chimica Acta, 2002 - Elsevier
Silver carboxylates [Ag (O2CR): R= Me, tBu, 2, 4, 6-Me3C6H2], fluorocarboxlyates [Ag
(O2CRf): Rf= C3F7, C6F13, C7F15] and their phosphine adducts [Ag (O2CR)· nPR3′: R …

Particle-free gold metal–organic decomposition ink for inkjet printing of gold structures

C Schoner, A Tuchscherer, T Blaudeck, SF Jahn… - Thin Solid Films, 2013 - Elsevier
The application of liquid [AuO2CCH2 (OCH2CH2) 2OCH3 (nBu3P)](1) as a metal–organic
decomposition ink containing 34.2 wt.% of gold is reported. Chemical and physical …

Chemistry of gold (I, III) complexes with organic ligands as potential MOCVD precursors for fabrication of thin metallic films and nanoparticles

TV Basova, A Hassan, NB Morozova - Coordination Chemistry Reviews, 2019 - Elsevier
The present review deals with the chemistry of complexes of gold (I) and gold (III) with
organic ligands. Compounds classified according to the type of coordinating ligands and …

Deposition of Silver Thin Films Using the Pyrazolate Complex [Ag(3,5‐(CF3)2C3HN2)]3

Y Chi, E Lay, TY Chou, YH Song… - Chemical Vapor …, 2005 - Wiley Online Library
The synthesis and characterization of a series of silver pyrazolate complexes [Ag (tfpz)] 3
(1),[Ag (fbpz)] 3 (2),[Ag (dbpz)] 3 (3), and [(py) Ag (tfpz)] 2 (4) are reported, for which tfpz …

Aerosol-assisted chemical vapour deposition of silver films from adducts of functionalised silver carboxylates

DA Edwards, MF Mahon, KC Molloy… - Journal of Materials …, 2003 - pubs.rsc.org
A series of silver carboxylates containing unsaturated groups within the ligand have been
synthesised [AgO2CR, R= CH2CN (1), H2CCH (3), H2CCHCH2CH2 (5), Me (H) CC (Me)(8) …

Thermally robust gold and silver iminopyrrolidinates for chemical vapor deposition of metal films

JP Coyle, PG Gordon, AP Wells, DJ Mandia… - Chemistry of …, 2013 - ACS Publications
Dimeric silver (I) and gold (I) tert-butyl-imino-2, 2-dimethylpyrrolidinates were synthesized
and characterized by thermal gravimetric analysis (TGA), differential scanning calorimetry …

Characterization of silver trimethylacetate complexes with tertiary phosphines as CVD precursors of thin silver films

P Piszczek, E Szłyk, M Chaberski… - Chemical Vapor …, 2005 - Wiley Online Library
Abstract AgI complexes [Ag (O2CtBu)(PMe3)](1) and [Ag (O2CtBu)(PEt3)](2) were used as
CVD precursors. Silver films between 30 nm and 100 nm were deposited from the above …