This paper reviews mass spectrometers based on micro-electro-mechanical systems
(MEMS) technology. The MEMS approach to integration is first briefly described, and the …

This short review focuses on the application of SU-8 for the microchip-based approach to the
miniaturization of mass spectrometry. Chip-based mass spectrometry will make the …

An optical blackbody is an ideal absorber for all incident optical radiation, and the theoretical
study of its radiation spectra paved the way for quantum mechanics (Planck's law). Herein …

In the past two decades, miniature mass spectrometers have developed rapidly as the
requirements of on-site detection have been growing continuously. At present, it seems that …

This chapter discusses the lithography considerations prior to wafer processing, including
layout design such as the rules concerning minimum lines and spaces, required overlaps …

The objective of ion current detectors used with mass spectrometers is to provide a measure
of the intensity of ions with different m/z values that have been separated in a mass analyzer …

An array micro Faraday cup ion detector for FAIMS (High-field Asymmetric Waveform Ion
Mobility Spectrometry) was introduced, with which the size of the FAIMS system was …

Due to its flexibility and sensitivity, mass spectrometry is a preferred sensing method for
applications ranging from explosives detection to air quality monitoring. The key functional …

Micro-Faraday cup array (MFCA) detectors are used for the detection and analysis of
incident ion particles with greater stability and precision. New and simple micro FCA …