[HTML][HTML] Nanoelectromechanical sensors based on suspended 2D materials

MC Lemme, S Wagner, K Lee, X Fan, GJ Verbiest… - Research, 2020 - spj.science.org
The unique properties and atomic thickness of two-dimensional (2D) materials enable
smaller and better nanoelectromechanical sensors with novel functionalities. During the last …

Mechanics of freely‐suspended ultrathin layered materials

A Castellanos‐Gomez, V Singh… - Annalen der …, 2015 - Wiley Online Library
The study of atomically thin two‐dimensional materials is a young and rapidly growing field.
In the past years, a great advance in the study of the remarkable electrical and optical …

[HTML][HTML] Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

X Fan, AD Smith, F Forsberg, S Wagner… - Microsystems & …, 2020 - nature.com
Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and
excellent electronic properties make it an ideal candidate as a material for membranes in …

Mechanical and electromechanical properties of graphene and their potential application in MEMS

ZH Khan, AR Kermany, A Öchsner… - Journal of Physics D …, 2017 - iopscience.iop.org
Graphene-based micro-electromechanical systems (MEMS) are very promising candidates
for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we …

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

X Fan, F Forsberg, AD Smith, S Schröder, S Wagner… - Nature …, 2019 - nature.com
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the
development of next-generation mobile, wearable and implantable devices. However, these …

Suspended graphene membranes with attached silicon proof masses as piezoresistive nanoelectromechanical systems accelerometers

X Fan, F Forsberg, AD Smith, S Schröder… - Nano …, 2019 - ACS Publications
Graphene is an atomically thin material that features unique electrical and mechanical
properties, which makes it an extremely promising material for future nanoelectromechanical …

Shape tailoring to enhance and tune the properties of graphene nanomechanical resonators

D Miller, B Alemán - 2D Materials, 2017 - iopscience.iop.org
The shape of a nanomechanical resonator profoundly affects its mechanical properties and
determines its suitability for various applications, such as ultra-sensitive mass and force …

Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers

C He, J Ding, X Fan - Micromachines, 2024 - mdpi.com
The mechanical characteristics of graphene ribbons with an attached proof mass that can be
used as NEMS transducers have been minimally studied, which hinders the development of …

An inkjet printing technique for scalable microfabrication of graphene-based sensor components

YM Fu, MC Chou, CH Kang, YT Cheng, PW Wu… - IEEE …, 2020 - ieeexplore.ieee.org
This paper presents a versatile and precise graphene patterning technique using the
combined process of masking and inkjet printing. A graphene-based structure is fabricated …

[HTML][HTML] Research Progress of Graphene Nano-Electromechanical Resonant Sensors—A Review

SC Fan, Y Lu, PC Zhao, FT Shi, ZS Guo, WW Xing - Micromachines, 2022 - mdpi.com
Graphene nano-electromechanical resonant sensors have wide application in areas such
as seawater desalination, new energy, biotechnology, and aerospace due to their small …