Advances in microfabrication technology have enabled micromechanical systems (MEMS)
to become a core component in a manifold of applications. For many of these applications …

Transition metal doping of aluminium nitride (AlN) type thin films was recently employed to
increase the piezoelectric constants for application in micro electromechanical systems. Y x …

Resonant mechanical sensors are often considered as mass balance, which responds to an
analyte adsorbed on or absorbed in a thin sensitive (and selective) layer deposited on the …

Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous
polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the …

We introduce a novel method for fast measurement of liquid viscosity and density using two
cantilevers with different geometries. Our method can be used for real-time monitoring in lab …

This paper reports on the successful implementation of an aluminum nitride (AlN)
piezoelectric film for the fabrication of a large-aperture MEMS scanning micromirror. To …

In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-
cost sensor system to detect microscopic particles in real-time, which can be present in a …

We present a novel resonant MEMS sensor for the detection of particles with dielectric
properties in liquid environments. The sensor consists of a piezoelectrically excited silicon …

It is the objective of this paper to report on the performance of piezoelectric MEMS
resonators for viscosity and density measurements at elevated temperatures. A custom-built …

We present a novel MEMS sensor which allows the detection of ferrous particles in liquid
environments. The device is based on a resonantly excited silicon microcantilever with an …