Piezoelectric MEMS resonators: A review

G Pillai, SS Li - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

A review of eigenmode and frequency control in piezoelectric MEMS resonators

Z Liu, F Ayazi - IEEE Transactions on Ultrasonics …, 2023 - ieeexplore.ieee.org
Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …

MEMS resonators for frequency reference and timing applications

G Wu, J Xu, EJ Ng, W Chen - Journal of …, 2020 - ieeexplore.ieee.org
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

An improved difference temperature compensation method for MEMS resonant accelerometers

P Cai, X Xiong, K Wang, J Wang, X Zou - Micromachines, 2021 - mdpi.com
Resonant accelerometers are promising because of their wide dynamic range and long-term
stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less …

A micro-oven-controlled dual-mode piezoelectric MEMS resonator with±400 PPB stability over− 40 to 80° C temperature range

W Jia, W Chen, Y Xiao, Z Wu… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, the design, implementation, and characterization of a micro-oven-controlled
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …

A Micro-hotplate-based Oven-controlled System used to Improve the Frequency Stability of MEMS Resonators

T Feng, D Yu, B Wu, H Wang - Micromachines, 2023 - mdpi.com
This paper introduces a chip-level oven-controlled system for improving the temperature
stability of MEMS resonators wherein we designed the resonator and the micro-hotplate …

Magnet-less circulator using AlN MEMS filters and CMOS RF switches

C Xu, G Piazza - Journal of Microelectromechanical Systems, 2019 - ieeexplore.ieee.org
A circulator with three ports allows unidirectional (or non-reciprocal) power transmission and
facilitates the development of in-band full duplexers for simultaneous transmit and receive …

Design and fabrication of temperature-insensitive MEMS pressure sensor utilizing aluminum-silicon hybrid structures

X Xie, J Zhang, M Li, Q Liu, X Mao - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
In order to meet the requirements for high sensitivity and low temperature drift of pressure
sensors in the field of meteorological detection or tire pressure monitoring system (TPMS) …

Investigation of parallel-connected MEMS electrostatic energy harvesters for enhancing output power over a wide frequency range

J Li, X Tong, J Oxaal, Z Liu, M Hella… - Journal of …, 2019 - iopscience.iop.org
Microelectromechanical-systems (MEMS) electrostatic energy harvesters, converting
vibration energy into electricity, is an active area of research and is envisioned to supply …

An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of±100 ppb over industrial temperature range

Y Xiao, K Zhu, J Han, F Dong, C Sun, S Liu… - Sensors and Actuators A …, 2024 - Elsevier
This work demonstrates a piezoelectric MEMS dual-resonator platform with an oven control.
The platform includes a micro-oven in-chip, which integrates a frequency output resonator …