Piezoelectric MEMS resonators: A review
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
A review of eigenmode and frequency control in piezoelectric MEMS resonators
Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …
properties, such as strong electromechanical coupling, high, and polarized linear …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
An improved difference temperature compensation method for MEMS resonant accelerometers
Resonant accelerometers are promising because of their wide dynamic range and long-term
stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less …
stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less …
A micro-oven-controlled dual-mode piezoelectric MEMS resonator with±400 PPB stability over− 40 to 80° C temperature range
W Jia, W Chen, Y Xiao, Z Wu… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, the design, implementation, and characterization of a micro-oven-controlled
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …
A Micro-hotplate-based Oven-controlled System used to Improve the Frequency Stability of MEMS Resonators
T Feng, D Yu, B Wu, H Wang - Micromachines, 2023 - mdpi.com
This paper introduces a chip-level oven-controlled system for improving the temperature
stability of MEMS resonators wherein we designed the resonator and the micro-hotplate …
stability of MEMS resonators wherein we designed the resonator and the micro-hotplate …
Magnet-less circulator using AlN MEMS filters and CMOS RF switches
A circulator with three ports allows unidirectional (or non-reciprocal) power transmission and
facilitates the development of in-band full duplexers for simultaneous transmit and receive …
facilitates the development of in-band full duplexers for simultaneous transmit and receive …
Design and fabrication of temperature-insensitive MEMS pressure sensor utilizing aluminum-silicon hybrid structures
X Xie, J Zhang, M Li, Q Liu, X Mao - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
In order to meet the requirements for high sensitivity and low temperature drift of pressure
sensors in the field of meteorological detection or tire pressure monitoring system (TPMS) …
sensors in the field of meteorological detection or tire pressure monitoring system (TPMS) …
Investigation of parallel-connected MEMS electrostatic energy harvesters for enhancing output power over a wide frequency range
Microelectromechanical-systems (MEMS) electrostatic energy harvesters, converting
vibration energy into electricity, is an active area of research and is envisioned to supply …
vibration energy into electricity, is an active area of research and is envisioned to supply …
An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of±100 ppb over industrial temperature range
This work demonstrates a piezoelectric MEMS dual-resonator platform with an oven control.
The platform includes a micro-oven in-chip, which integrates a frequency output resonator …
The platform includes a micro-oven in-chip, which integrates a frequency output resonator …