This article presents the design, analysis, and prototype test of a novel spatial deployable
three-degree of freedom (DOF) compliant nano-positioner with a three-stage motion …

A new design of three degrees-of-freedom (DOF) translational motion stage (XYZ stage) is
presented in this paper. This XYZ stage is based on MEMS and designed by combining …

This paper describes the development of a micro-electro-mechanical-systems (MEMS)
repulsive actuator capable of producing an out-of-plane force in the tens of micro Newtons …

A MEMS actuator for micrometric displacements in the out-of-plane direction is proposed in
this paper. The device is based on a compliant micromechanism composed of a thick layer …

This paper presents the design, fabrication and testing of a Micro Electro Mechanical
Systems (MEMS) based positioning stage which is capable of generating translational …

This paper describes the design, modeling, and simulation of a novel flexure-based XY
nano positioning stage driven by piezoelectric actuators (PEAs). As the output of PEAs is …

A miniaturized translational motion stage has potentials to provide not only performances
equivalent to conventional motion stages, but also additional features from its small form …

Optical tweezers (OT) can be viewed as a robot that uses a highly focused laser beam for
precise manipulation of biological objects and dielectric beads at micro-scale. Using …