Optical spectroscopy is a powerful, nonintrusive diagnostic tool that can provide
unparalleled insight into fundamental plasma properties. Specifically, these techniques are …

This review focuses on the use of diagnostic tools to examine plasma processing chemistry,
primarily plasma species energetics, dynamics, and molecule-surface reactions. We …

Vertical graphene (VG) is a promising material for energy-storage, sensor, and electronic
applications, owing to excellent structural, mechanical, and electrical properties. An existing …

A rate equation model is devised to study the ion composition of inductively coupled H 2-Ar
plasmas with different H 2-Ar mixing ratios. The model is applied to calculate the ion …

Regarding the recent debate on the usefulness of macroscopic kinetics for plasma
polymerization, we further investigated the deposition of oxygen‐containing functional …

Tin oxide operates widely as a gas sensor for a variety of molecules via a mechanism that
relies on interactions with adsorbed oxygen. To enhance these interactions by increasing …

Synthesis process of graphene nano-flakes produced in radio-frequency inductively coupled
plasma system by axially injecting CH 4 into Ar–H 2 plasma is investigated at different …

Inductively coupled H 2-Ar plasmas are characterized by an energy-dispersive mass
spectrometer (plasma monitor), a retarding field analyzer, optical emission spectroscopy …

Filtered cathodic vacuum arc (FCVA) deposition is regarded as an important technique for
the synthesis of tetrahedral amorphous carbon (ta-C) films due to its high ionization rate …

In an inductively coupled H 2-Ar plasma at a total pressure of 1.5 Pa, the influence of the
electrode cover material on selected line intensities of H, H 2, and Ar are determined by …