We report a new atomic layer deposition (ALD) process for yttrium oxide (Y2O3) thin films
using tris (N, N′-diisopropyl-2-dimethylamido-guanidinato) yttrium (III)[Y (DPDMG) 3] which …

Y2O3 thin films were grown on silicon (100) substrates by pulsed-laser deposition at
different substrate temperatures and O2 pressures. The structure and composition of films …

Yttrium oxide thin films were deposited on Si (1 1 1) and quartz substrates by pulsed laser
deposition technique at different substrate temperature and oxygen partial pressure. XRD …

Yttrium oxide films were prepared on silicon wafers by reactive magnetron sputtering at
different oxygen flow rates to investigate the microstructure and optical properties for …

Thin films of yttrium oxide, Y 2 O 3⁠, were deposited by reactive sputtering and reactive
evaporation to determine their suitability as a host for a rare earth doped planar waveguide …

Undoped and Mg-doped (y=[Mg2+]/[Fe3+]= 1, 2, 3, and 4 at.%) Fe2O3 thin films were
synthesized by a simple spray pyrolysis technique. The thin films were extensively …

Micro-structuration of rare-earth-doped materials by lift-off processing of pulsed laser
deposited layers are promising in integrated optics, since they do not require complex …

Thin films of aluminum oxide (Al2O3), tantalum pentoxide (Ta2O5), titanium oxide (TiO2),
yttrium oxide (Y2O3) and zirconium oxide (ZrO2) were deposited by plasma assisted …

In situ Yb-doped amorphous carbon thin films were grown on Si substrates at low
temperatures (< 200° C) by a simple one-step RF-PEMOCVD system as a potential photonic …

The step-by-step growth of yttrium oxide layer was controlled in situ using X-ray
photoelectron spectroscopy (XPS). The O/Y atomic concentration (AC) ratio in the surface …