Evaluation of the chemical states and electrical activation of ultra-highly B-doped Si1-xGex by ion implantation and subsequent nanosecond laser annealing

K Lee, C Jo, D Yoon, S Baik, DH Ko - Applied Surface Science, 2024 - Elsevier
Given that transistor dimensions are approaching atomic scale in metal–oxide–
semiconductor field-effect-transistors (MOSFETs), attaining low-contact resistivity (ρ c) …

Atom probe tomography of hyper-doped Ge layers synthesized by Sb in-diffusion by pulsed laser melting

S Ndiaye, S Duguay, F Vurpillot, C Carraro… - Materials Science in …, 2023 - Elsevier
Hyper-doped Ge layers synthesized by Sb in-diffusion by pulsed laser melting have been
analyzed by Atom Probe Tomography (APT). The 1D concentration profiles obtained by APT …

Ex-situ n-type doped carrier-injection layers in direct bandgap GeSn LEDs

L Casiez, C Cardoux, PA Alba, N Bernier… - Materials Science in …, 2024 - Elsevier
The reconstruction of thick GeSn crystalline layers implanted with phosphorus is explored.
Our study demonstrates (i) the potential for recrystallizing amorphized GeSn crystal under …

Synthesis of relaxed Ge0. 9Sn0. 1/Ge by nanosecond pulsed laser melting

E Di Russo, F Sgarbossa, P Ranieri, G Maggioni… - Applied Surface …, 2023 - Elsevier
We present a new approach to the fabrication of fully relaxed Ge 1-y Sn y layers on Ge with
Sn concentration y up to 13 at.% The incorporation of Sn in Ge was obtained by sputtering of …

Charge transport in n-type As-and Sb-hyperdoped Ge

M Wang, MS Shaikh, Y Li, S Prucnal, J Zuk… - Applied Physics …, 2024 - pubs.aip.org
This paper presents a systematic study of the charge transport behavior of heavily doped n-
type Ge layers with As and Sb. A nonequilibrium method ion implantation followed by …

Fabrication, characterization and application of Si₁₋ ₓ₋ ᵧGeₓSnᵧ alloys

O Steuer - 2024 - tud.qucosa.de
Abstract (EN) Within the framework of this thesis, the influence of non equilibrium post
growth thermal treatments of ion implanted and epitaxially grown Ge1-xSnx and Si1-x …

Investigation of Germanium Hyperdoping by Pulsed Laser Melting

M PATANE - thesis.unipd.it
In recent years the interest of both scientific community and industry in germanium (Ge) has
seen a spike, owing to its specific properties. Germanium exhibits interesting electrical …

[DOC][DOC] ORAL PRESENTATION

E Di Russo, D Fontana, F Sgarbossa, S Ndiaye… - congressos.urv.cat
 Ge 1-y Sn y alloys with high Sn content is a keystone for a large number of applications
ranging from high performance nanoelectronics to integrated mid-infrared photonics in Si [1] …

[引用][C] Fabrication, characterization and application of Si1-x-yGexSny alloys

BDS Prucnal, Y Georgiev, GPDG Cuniberti, M Helm