Comparison of methods to quantify interface trap densities at dielectric/III-V semiconductor interfaces
R Engel-Herbert, Y Hwang, S Stemmer - Journal of applied physics, 2010 - pubs.aip.org
Methods to extract trap densities at high-permittivity (k) dielectric/III-V semiconductor
interfaces and their distribution in the semiconductor band gap are compared. The …
interfaces and their distribution in the semiconductor band gap are compared. The …
The Characterization and Passivation of Fixed Oxide Charges and Interface States in the MOS System
In this paper, we present a review of experimental results examining charged defect
components in the Al 2 O 3/In 0.53 Ga 0.47 As metal-oxide-semiconductor (MOS) system …
components in the Al 2 O 3/In 0.53 Ga 0.47 As metal-oxide-semiconductor (MOS) system …
Atomistic kinetic Monte Carlo study of atomic layer deposition derived from density functional theory
M Shirazi, SD Elliott - Journal of computational chemistry, 2014 - Wiley Online Library
To describe the atomic layer deposition (ALD) reactions of HfO2 from Hf (N (CH3) 2) 4 and
H2O, a three‐dimensional on‐lattice kinetic Monte‐Carlo model is developed. In this model …
H2O, a three‐dimensional on‐lattice kinetic Monte‐Carlo model is developed. In this model …
On the interface state density at In0. 53Ga0. 47As/oxide interfaces
The authors model the capacitance-voltage (CV) behavior of In 0.53 Ga 0.47 As metal-oxide-
semiconductor (MOS) structures and compare the results to experimental C V-curves. Due to …
semiconductor (MOS) structures and compare the results to experimental C V-curves. Due to …
An investigation of capacitance-voltage hysteresis in metal/high-k/In0. 53Ga0. 47As metal-oxide-semiconductor capacitors
In this work, we present the results of an investigation into charge trapping in metal/high-k/In
0.53 Ga 0.47 As metal-oxide-semiconductor capacitors (MOS capacitors), which is analysed …
0.53 Ga 0.47 As metal-oxide-semiconductor capacitors (MOS capacitors), which is analysed …
Investigation of electronic structure, optical properties, map of electrostatic potential, and toxicity of Hfo2, Hf0. 88si0. 12o2, Hf0. 88Ge0. 12o2 and Hf0. 88Sn0. 12O2 by …
This research work presents a computational investigation of hafnium (IV) oxide and its
crystals doped by Si, Ge and Sn atoms, replacing the oxygen atom in HfO2. Hafnium (IV) …
crystals doped by Si, Ge and Sn atoms, replacing the oxygen atom in HfO2. Hafnium (IV) …
Multiple proton diffusion and film densification in atomic layer deposition modeled by density functional theory
M Shirazi, SD Elliott - Chemistry of Materials, 2013 - ACS Publications
To investigate the atomic layer deposition (ALD) reactions for growth of HfO2 from Hf (NMe2)
4 (TDMAHf) and H2O, a density functional theory (DFT) slab model was employed. We …
4 (TDMAHf) and H2O, a density functional theory (DFT) slab model was employed. We …
Charged Defect Quantification in Pt/Al2O3/In0. 53Ga0. 47As/InP MOS Capacitors
RD Long, B Shin, S Monaghan… - Journal of The …, 2011 - iopscience.iop.org
This work focuses on the separation and quantification of fixed bulk oxide charge, fixed
charge at the dielectric–semiconductor interface and interface state charge components in …
charge at the dielectric–semiconductor interface and interface state charge components in …
Electrical analysis of three-stage passivated In0. 53Ga0. 47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer
S Monaghan, A O'Mahony, K Cherkaoui… - Journal of Vacuum …, 2011 - pubs.aip.org
The atomic layer deposition of high dielectric constant oxides like HfO 2 on III-V substrates
such as In 0.53 Ga 0.47 As leads to a poor interface, with the growth of In 0.53 Ga 0.47 As …
such as In 0.53 Ga 0.47 As leads to a poor interface, with the growth of In 0.53 Ga 0.47 As …
A study of capacitance–voltage hysteresis in the HfO2/InGaAs metal-oxide-semiconductor system
In this work, we performed a study of capacitance–voltage (C–V) hysteresis in HfO 2/InGaAs
metal-oxide-semiconductor (MOS) systems. The charge trapping density estimated from the …
metal-oxide-semiconductor (MOS) systems. The charge trapping density estimated from the …