(60) Provisional application No. 60/960,085, filed on Sep.(57) ABSTRACT 14, 2007,
provisional application No. 61/071,949, An illumination optical system which illuminates a …

An illumination optical apparatus guides exposure light emitted from an exposure light
source, to an illumination target object. The illumination optical apparatus has a plurality of …

An illumination optical system for illuminating an irradiated plane M with illumination light
provided from a light source includes a spatial light modulator, which is arranged in an …

To optionally forming a multilevel light intensity distribution on an illumination pupil plane,
the illumination apparatus implements Köhler illumination on an illumination target Surface …

A surface inspection apparatus (1) has a stage (5) for supporting a wafer (10) on which
predetermined patterns have been formed by exposure using an exposure device (100); an …

In order to determine whether an exposure apparatus is out putting the correct dose of
radiation and a projection system of the exposure apparatus is focusing the radiation …

Disclosed herein is a method for inspecting a transparent film. The method comprises
irradiating an inspection target with light using a polarizer, receiving light that is reflected by …

The present invention relates to an inspection apparatus and method which include
projecting a measurement radiation beam onto a target on a substrate in order to measure …

(57) ABSTRACT A spectroscopic scatterometer detects both zero order and higher order
radiation diffracted from an illuminated spot on a target grating. The apparatus forms and …

A defect inspection device and an inspection method which can decide the quality of a
pattern shape of a sample surface in a short time are provided. A defect inspection device 20 …