A review of MEMS vibrating gyroscopes and their reliability issues in harsh environments

WA Gill, I Howard, I Mazhar, K McKee - Sensors, 2022 - mdpi.com
Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of
attention over the last two decades because of their low power consumption, easy …

Silicon MEMS inertial sensors evolution over a quarter century

G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Frequency-modulated mems gyroscopes: A review

X Ren, X Zhou, S Yu, X Wu, D Xiao - IEEE sensors journal, 2021 - ieeexplore.ieee.org
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

A novel model for fully closed-loop system of hemispherical resonator gyroscope under force-to-rebalance mode

Z Xu, B Xi, G Yi, D Wang - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This article proposes a modeling method for the fully closed-loop system of hemispherical
resonator gyroscope (HRG) under force-to-rebalance mode. A fully closed-loop system …

Fully differential single resonator FM gyroscope using CW/CCW mode separator

T Tsukamoto, S Tanaka - Journal of Microelectromechanical …, 2018 - ieeexplore.ieee.org
This paper reports a fully differential frequency modulated (FM) gyroscope where the
superposed clockwise (CW) and counter clockwise (CCW) modes are independently …

Asynchronous tracking control of amplitude signals in vibratory gyroscopes with partially unknown mode information

Z Xu, D Wang, G Yi, Z Hu - IEEE Transactions on Industrial …, 2022 - ieeexplore.ieee.org
Vibratory gyroscopes are the most ideal inertial sensors in the 21st century. The amplitude is
an important index of vibratory gyroscopes. This article investigates an asynchronous …

A comprehensive review of micro-inertial measurement unit based intelligent PIG multi-sensor fusion technologies for small-diameter pipeline surveying

L Guan, X Cong, Q Zhang, F Liu, Y Gao, W An… - Micromachines, 2020 - mdpi.com
It is of great importance for pipeline systems to be is efficient, cost-effective and safe during
the transportation of the liquids and gases. However, underground pipelines often …

High-precision control scheme for hemispherical resonator gyroscopes with application to aerospace navigation systems

Z Xu, B Xi, G Yi, CK Ahn - Aerospace Science and Technology, 2021 - Elsevier
In recent years, hemispherical resonator gyroscopes (HRGs) have been implemented in
aerospace navigation systems (ANSs). This paper proposes a high-precision driving …

Long-term characterization of a new wide-angle micromirror with PZT actuation and PZR sensing

P Frigerio, B Di Diodoro, V Rho… - Journal of …, 2021 - ieeexplore.ieee.org
This work presents a long-term characterization of a newly designed
microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view …

Fully Integrated, 406 A, /hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope

M Leoncini, M Bestetti, A Bonfanti… - IEEE Transactions …, 2018 - ieeexplore.ieee.org
In this paper, a complete system of a frequency-modulated gyroscope with digital output for
future low-power, high-stability, and wide full-scale applications is presented. The system …