Heterogeneous integration of compound semiconductors

O Moutanabbir, U Gösele - Annual Review of Materials …, 2010 - annualreviews.org
The ability to tailor compound semiconductors and to integrate them onto foreign substrates
can lead to superior or novel functionalities with a potential impact on various areas in …

Hydrogen blistering of silicon: Progress in fundamental understanding

B Terreault - Physica status solidi (a), 2007 - Wiley Online Library
When silicon is implanted with a sufficient concentration of H ions, at low to moderate
temperature, and subsequently annealed at high temperature, dome‐shaped gas‐filled …

Hydrogen induced degradation: A possible mechanism for light-and elevated temperature-induced degradation in n-type silicon

D Chen, PG Hamer, M Kim, TH Fung… - Solar Energy Materials …, 2018 - Elsevier
In this work, we demonstrate a form of minority carrier degradation on n-type Cz silicon that
affects both the bulk and surface related lifetimes. We identify three key behaviors of the …

Effect of H and He irradiation on cavity formation and blistering in ceramics

SJ Zinkle - Nuclear Instruments and Methods in Physics Research …, 2012 - Elsevier
Single-or poly-crystalline specimens of SiC, Si3N4, MgO, Al2O3 and MgAl2O4 were
implanted with 0.4–1MeV H+ or He+ ion beams at room temperature and 650° C up to …

Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator

Y Yan, K Huang, H Zhou, X Zhao, W Li… - ACS Applied …, 2019 - ACS Publications
A high-performance filter is the key component in 5G communication. A surface acoustic
wave (SAW) resonator fabricated on a piezoelectric thin film instead of piezoelectric bulk …

Wafer-scale single-crystalline β-Ga2O3 thin film on SiC substrate by ion-cutting technique with hydrophilic wafer bonding at elevated temperatures

Z Shen, W Xu, Y Chen, J Lin, Y Xie, K Huang… - Science China …, 2023 - Springer
Heterogeneous integration of β-Ga2O3 on a highly thermal conductive SiC substrate is an
efficient solution to solve its bottleneck of thermal dissipation for high-power electronics. In …

Defect evolution and dopant activation in laser annealed Si and Ge

F Cristiano, M Shayesteh, R Duffy, K Huet… - Materials Science in …, 2016 - Elsevier
Defect evolution and dopant activation are intimately related to the use of ion implantation
and annealing, traditionally used to dope semiconductors during device fabrication. Ultra …

Efficient ion-slicing of InP thin film for Si-based hetero-integration

J Lin, T You, M Wang, K Huang, S Zhang, Q Jia… - …, 2018 - iopscience.iop.org
Integration of high quality single crystalline InP thin film on Si substrate has potential
applications in Si-based photonics and high-speed electronics. In this work, the exfoliation of …

Evaluating the effects of space weathering on magnetite on airless planetary bodies

LC Chaves, MS Thompson, MJ Loeffler, CA Dukes… - Icarus, 2023 - Elsevier
Magnetite is a relevant mineral component of asteroids as it has been identified in
carbonaceous chondrites, on the surface of asteroid Bennu through remote sensing …

Extended defects formation in nanosecond laser-annealed ion implanted silicon

Y Qiu, F Cristiano, K Huet, F Mazzamuto, G Fisicaro… - Nano …, 2014 - ACS Publications
Damage evolution and dopant distribution during nanosecond laser thermal annealing of
ion implanted silicon have been investigated by means of transmission electron microscopy …