Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

A comb-actuated torsional microscanner is developed for high-resolution laser-scanning
display systems. Typical torsional comb-drive scanners have fingers placed around the …

The dynamics of the out-of-plane comb-drive actuator used in a torsional resonant mode
microscanner is discussed. The microscanner is fabricated using the standard SOI …

Resonant rotational scanning micromirrors with electrostatic comb-drive actuators are widely
used in generating structured lights for 3D sensing, but their resonant scanning stability is …

The maximum scan angle amplitude of resonating micro-mirrors, intended for micro-
projection display applications is limited by air damping. Three-dimensional transient Navier …

In this work, a real-time capacitive sensing scheme based on electromechanical amplitude
modulation is developed to detect the scanning angle and phase of a uniaxial electrostatic …

A novel damping model to accurately analyze the scanning angle of electrostatic
microelectromechanical system (MEMS) mirrors is proposed in this article. The …

Quantification and minimisation of energy consumption in resonant MEMS micromirrors is a
key aspect for a proper structural design. In this setting, the quality factor Q of the drive mode …

Damping is the limiting factor for the reachable maximum deflection. Thus, it is a very
important issue for resonant microsystems. In this paper, we present a damping model for …

This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-
spring model to predict the dynamic response of electrostatic resonant micro-electro …