Recent trends in piezoelectric actuators for precision motion and their applications: A review

S Mohith, AR Upadhya, KP Navin… - Smart Materials and …, 2020 - iopscience.iop.org
The need for precision positioning applications has enormously influenced the research and
development towards the growth of precision actuators. Over the years, piezoelectric …

A review on the flexure-based displacement amplification mechanisms

F Chen, Q Zhang, Y Gao, W Dong - IEEE Access, 2020 - ieeexplore.ieee.org
Multifarious flexure-based displacement amplifiers have been proposed and studied in the
past decades, showing importance in many industrial fields, such as bioengineering, optical …

A novel XYZ micro/nano positioner with an amplifier based on L-shape levers and half-bridge structure

Y Tian, Y Ma, F Wang, K Lu, D Zhang - Sensors and Actuators A: Physical, 2020 - Elsevier
This paper presents the design, modeling, and experimental validation of a novel XYZ
micro/nano positioner driven by piezoelectric actuator (PEA). To achieve a large motion …

A spatial deployable three-DOF compliant nano-positioner with a three-stage motion amplification mechanism

Y Tian, K Lu, F Wang, C Zhou, Y Ma… - IEEE/ASME …, 2020 - ieeexplore.ieee.org
This article presents the design, analysis, and prototype test of a novel spatial deployable
three-degree of freedom (DOF) compliant nano-positioner with a three-stage motion …

Progressing towards high performance non-resonant piezoelectric stepping actuators

D Berry, TVK Vo, KHH Li, TM Lubecki… - Sensors and Actuators A …, 2023 - Elsevier
Piezoelectric actuators are emerging as a promising technology with their potential to deliver
a system with high specific power, accuracy, quick response and resolution. Over the years …

Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion

HJ Lee, S Woo, J Park, JH Jeong, M Kim, J Ryu… - Microsystem …, 2018 - Springer
This paper presents a novel XY nano-positioning stage using a compliant parallel
mechanism with small crosstalk and yaw motion. A parallel mechanism can implement multi …

An XYZ micromanipulator for precise positioning applications

M Ghafarian, B Shirinzadeh, A Al-Jodah… - Journal of Micro-Bio …, 2020 - Springer
A three-degrees-of-freedom (3-DOF) monolithic compliant parallel micromanipulator with
bridge-type displacement amplifier is presented in this paper. The research aims are to …

A compact 2-DOF piezo-driven positioning stage designed by using the parasitic motion of flexure hinge mechanism

X Li, X Wang, W Sun, K Wang, Z Yang… - Smart Materials and …, 2019 - iopscience.iop.org
This paper presents a compact two-degrees of freedom piezo-driven positioning stage. To
achieve large working stroke, the stick-slip principle was employed, and to make the stage …

Design of reconfigurable planar micro-positioning stages based on function modules

B Ding, ZX Yang, X Xiao, G Zhang - IEEE Access, 2019 - ieeexplore.ieee.org
Micro-positioning stages, which are capable to meet the emerging industrial trend for
performing various kinds of micro-manipulation and micro-assembly tasks are the crucial …

Investigations on piezo actuated micro XY stage for vibration-assisted micro milling

P Prabhu, M Rao - Journal of Micromechanics and …, 2021 - iopscience.iop.org
Vibration assisted machining is an advanced non-conventional precision machining
technique aiming at improving the machining performance by superimposing a small …