Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges
G Shan, Y Li, L Zhang, Z Wang, Y Zhang… - Review of Scientific …, 2015 - pubs.aip.org
Recent interest in high-precision positioning stages with large travel ranges has sparked
renewed attention to the development of voice coil motors (VCMs). Due to their large output …
renewed attention to the development of voice coil motors (VCMs). Due to their large output …
Vibration isolation and dual-stage actuation pointing system for space precision payloads
Y Kong, H Huang - Acta Astronautica, 2018 - Elsevier
Pointing and stability requirements for future space missions are becoming more and more
stringent. This work follows the pointing control method which consists of a traditional …
stringent. This work follows the pointing control method which consists of a traditional …
A rapid dynamic positioning method for settling time reduction through a macro–micro composite stage with high positioning accuracy
L Zhang, J Gao, X Chen - IEEE Transactions on Industrial …, 2017 - ieeexplore.ieee.org
A macro-micro composite precision positioning stage is mainly used in microelectronics
manufacturing to achieve high-velocity and high-precision positioning. The residual …
manufacturing to achieve high-velocity and high-precision positioning. The residual …
A rapid vibration reduction method for macro–micro composite precision positioning stage
A macro-micro composite precision positioning stage is mainly used in microelectronics
manufacturing to achieve high velocity, high precision, and large-stroke positioning. The …
manufacturing to achieve high velocity, high precision, and large-stroke positioning. The …
Synchronized motion control and precision positioning compensation of a 3-DOFs macro–micro parallel manipulator fully actuated by piezoelectric actuators
Q Zhang, C Li, J Zhang, X Zhang - Smart Materials and …, 2017 - iopscience.iop.org
The macro–micro combined approach, as an effective way to realize trans-scale nano-
precision positioning with multi-dimensions and high velocity, plays a significant role in …
precision positioning with multi-dimensions and high velocity, plays a significant role in …
High-speed and high-precision tracking control of ultrahigh-acceleration moving-permanent-magnet linear synchronous motor
T Hama, K Sato - Precision engineering, 2015 - Elsevier
This paper describes the high-speed and high-precision tracking control of an ultrahigh-
acceleration, high-velocity linear synchronous motor (LSM). The linear motor can produce a …
acceleration, high-velocity linear synchronous motor (LSM). The linear motor can produce a …
Development of a novel dual servo magnetic levitation stage
The main objective of this paper is to propose, design, and control a novel dual servo
magnetic levitation stage which is precise and vacuum compatible. The dual servo …
magnetic levitation stage which is precise and vacuum compatible. The dual servo …
[PDF][PDF] 基于自学习非线性PID 的音圈电机精密定位系统
程苗苗， 翟朋辉， 张英杰， 李健， 冯凯 - 电工技术学报, 2023 - dgjsxb.ces-transaction.com
摘要基于音圈电机的精密宏微气浮运动系统, 是一种能克服接触摩擦和行程限制的新型精密定位
系统. 针对系统中用于精密定位的音圈电机受到内外扰动从而影响系统最终定位精度的问题 …
系统. 针对系统中用于精密定位的音圈电机受到内外扰动从而影响系统最终定位精度的问题 …
Multi-objective optimization design of a connection frame in macro–micro motion platform
L Zhang, Z Long, J Cai, F Luo, J Fang, MY Wang - Applied Soft Computing, 2015 - Elsevier
Connection frame is an essential component to implement high acceleration and ultra-
precision positioning motion in a macro–micro motion platform. The performance of the …
precision positioning motion in a macro–micro motion platform. The performance of the …
A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage
This paper presents a novel six-degree-of-freedom magnetic levitation fine stage for a dual-
servo stage. The proposed fine stage is levitated and actuated, using a voice coil motor …
servo stage. The proposed fine stage is levitated and actuated, using a voice coil motor …