A pressing need to develop low‐cost, environmentally friendly, and sensitive sensors has
arisen with the advent of the always‐connected paradigm of the internet‐of‐things (IoT). In …

The unique properties and atomic thickness of two-dimensional (2D) materials enable
smaller and better nanoelectromechanical sensors with novel functionalities. During the last …

Abstract Integrating two-dimensional (2D) materials into semiconductor manufacturing lines
is essential to exploit their material properties in a wide range of application areas. However …

The ability to extract materials just a few atoms thick has led to the discoveries of graphene,
monolayer transition metal dichalcogenides (TMDs), and other important two-dimensional …

High accuracy measurement of mechanical strain is critical and broadly practiced in several
application areas including structural health monitoring, industrial process control …

As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

Microphones exploit the motion of suspended membranes to detect sound waves. Since the
microphone performance can be improved by reducing the thickness and mass of its …

Thin-film resonators and scanning probe microscopies (SPM) are usually used on low-
frequency mechanical systems at the nanoscale or larger. Generally, off-chip approaches …

Pristine van der Waals (vdW) heterostructures formed between two-dimensional (2D) and
other materials can be used to create optical and electronic devices. However, the weak …

Nanodrum resonators have been fabricated using nanometer-thick gold films as the
drumheads. The fabrication method is favorable for large-area array manufacture of arbitrary …