Patterning: Principles and some new developments

M Geissler, Y Xia - Advanced Materials, 2004 - Wiley Online Library
This article provides an overview of various patterning methodologies, and it is organized
into three major sections: generation of patterns, replication of patterns, and three …

Nanofabrication by scanning probe microscope lithography: A review

AA Tseng, A Notargiacomo, TP Chen - Journal of Vacuum Science & …, 2005 - pubs.aip.org
In addition to its well-known capabilities in imaging and spectroscopy, scanning probe
microscopy (SPM) has recently shown great potentials for patterning of material structures in …

Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

XN Xie, HJ Chung, CH Sow, ATS Wee - Materials Science and …, 2006 - Elsevier
This review article aims to provide an updated and comprehensive description on the
development of atomic force microscopy (AFM) nanolithography for structuring and …

Nanolithography and nanochemistry: probe‐related patterning techniques and chemical modification for nanometer‐sized devices

D Wouters, US Schubert - Angewandte Chemie International …, 2004 - Wiley Online Library
The size regime for devices produced by photolithographic techniques is limited. Therefore,
other patterning techniques have been intensively studied to create smaller structures …

The art of SPM: Scanning probe microscopy in materials science

J Loos - Advanced Materials, 2005 - Wiley Online Library
Abstract In this Progress Report, outstanding scientific applications of scanning probe
microscopy (SPM) in the field of materials science and the latest technique developments …

Direct fabrication of thin layer MoS2 field-effect nanoscale transistors by oxidation scanning probe lithography

FM Espinosa, YK Ryu, K Marinov, D Dumcenco… - Applied Physics …, 2015 - pubs.aip.org
Thin layer MoS 2-based field effect transistors (FET) are emerging candidates to fabricate
very fast and sensitive devices. Here, we demonstrate a method to fabricate very narrow …

Sub-10 nm patterning of few-layer MoS2 and MoSe2 nanolectronic devices by oxidation scanning probe lithography

YK Ryu, AI Dago, Y He, FM Espinosa… - Applied Surface …, 2021 - Elsevier
The properties of 2D materials devices are very sensitive to the physical, chemical and
structural interactions that might happen during processing. Low-invasive patterning …

Advances and Applications of Oxidized van der Waals Transition Metal Dichalcogenides

BSY Kim, TD Ngo, Y Hassan, SH Chae… - Advanced …, 2024 - Wiley Online Library
The surface oxidation of 2D transition metal dichalcogenides (TMDs) has recently gained
tremendous technological and fundamental interest owing to the multi‐functional properties …

Oxidation conditions for octadecyl trichlorosilane monolayers on silicon: a detailed atomic force microscopy study of the effects of pulse height and duration on the …

D Wouters, R Willems, S Hoeppener… - Advanced Functional …, 2005 - Wiley Online Library
In current scanning‐probe nanolithography research, substrates consisting of octadecyl
trichlorosilane monolayers on silicon are often used. On one hand, the presence of an …

Writing Nanostructures: Scanning Probe Direct‐Write of Germanium Nanostructures (Adv. Mater. 41/2010)

JD Torrey, SE Vasko, A Kapetanovic, Z Zhu… - Advanced …, 2010 - Wiley Online Library
The cover image depicts the direct writing of a germanium nanostructure with the tip of an
atomic force microscope (AFM). Germanium writing occurs when the AFM tip traces the …