Patterning: Principles and some new developments
M Geissler, Y Xia - Advanced Materials, 2004 - Wiley Online Library
This article provides an overview of various patterning methodologies, and it is organized
into three major sections: generation of patterns, replication of patterns, and three …
into three major sections: generation of patterns, replication of patterns, and three …
Nanofabrication by scanning probe microscope lithography: A review
In addition to its well-known capabilities in imaging and spectroscopy, scanning probe
microscopy (SPM) has recently shown great potentials for patterning of material structures in …
microscopy (SPM) has recently shown great potentials for patterning of material structures in …
Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
This review article aims to provide an updated and comprehensive description on the
development of atomic force microscopy (AFM) nanolithography for structuring and …
development of atomic force microscopy (AFM) nanolithography for structuring and …
Nanolithography and nanochemistry: probe‐related patterning techniques and chemical modification for nanometer‐sized devices
D Wouters, US Schubert - Angewandte Chemie International …, 2004 - Wiley Online Library
The size regime for devices produced by photolithographic techniques is limited. Therefore,
other patterning techniques have been intensively studied to create smaller structures …
other patterning techniques have been intensively studied to create smaller structures …
The art of SPM: Scanning probe microscopy in materials science
J Loos - Advanced Materials, 2005 - Wiley Online Library
Abstract In this Progress Report, outstanding scientific applications of scanning probe
microscopy (SPM) in the field of materials science and the latest technique developments …
microscopy (SPM) in the field of materials science and the latest technique developments …
Direct fabrication of thin layer MoS2 field-effect nanoscale transistors by oxidation scanning probe lithography
Thin layer MoS 2-based field effect transistors (FET) are emerging candidates to fabricate
very fast and sensitive devices. Here, we demonstrate a method to fabricate very narrow …
very fast and sensitive devices. Here, we demonstrate a method to fabricate very narrow …
Sub-10 nm patterning of few-layer MoS2 and MoSe2 nanolectronic devices by oxidation scanning probe lithography
The properties of 2D materials devices are very sensitive to the physical, chemical and
structural interactions that might happen during processing. Low-invasive patterning …
structural interactions that might happen during processing. Low-invasive patterning …
Advances and Applications of Oxidized van der Waals Transition Metal Dichalcogenides
The surface oxidation of 2D transition metal dichalcogenides (TMDs) has recently gained
tremendous technological and fundamental interest owing to the multi‐functional properties …
tremendous technological and fundamental interest owing to the multi‐functional properties …
Oxidation conditions for octadecyl trichlorosilane monolayers on silicon: a detailed atomic force microscopy study of the effects of pulse height and duration on the …
D Wouters, R Willems, S Hoeppener… - Advanced Functional …, 2005 - Wiley Online Library
In current scanning‐probe nanolithography research, substrates consisting of octadecyl
trichlorosilane monolayers on silicon are often used. On one hand, the presence of an …
trichlorosilane monolayers on silicon are often used. On one hand, the presence of an …
Writing Nanostructures: Scanning Probe Direct‐Write of Germanium Nanostructures (Adv. Mater. 41/2010)
The cover image depicts the direct writing of a germanium nanostructure with the tip of an
atomic force microscope (AFM). Germanium writing occurs when the AFM tip traces the …
atomic force microscope (AFM). Germanium writing occurs when the AFM tip traces the …