The processing, particularly, etching of brittle, hard, and anti-corrosion materials represented
by the third-generation wide bandgap semiconductor silicon carbide (SiC), is a significant …

Abstract Design and modeling of microelectromechanical system (MEMS)-based
piezoresistive pressure sensor are main requirements to fabricate application-oriented …

Silicon carbide is considered as a more suitable material for piezoresistive pressure sensors
in a high-temperature environment due to its excellent characteristics. In this paper …

Silicon carbide piezoresistive pressure sensor is more suitable for harsh environment due to
its wide bandgap, corrosion tolerance, excellent chemical inertness, high Young's modulus …

Silicon and Polysilicon are used as piezoresistive materials in MEMS (Micro
Electromechanical system) piezoresistive pressure sensors because of its reproducibility …

The demand for flexible and wearable sensors is increasing day by day due to varied
applications in the biomedical field. Especially highly sensitive sensors are required for the …

Now a days MEMS based for biomedical applications with high performance parameters like
sensitivity and linearity are required for low pressure range. The low-pressure range (1–5 …

Purpose The purpose of this study is to find a new design that can increase the sensitivity of
the sensor without sacrificing the linearity. A novel and very efficient method for increasing …

Micro-mechanical systems (MEMS) based piezoresistive pressure sensors have significant
importance in several pressure sensor devices in real world, ie, aviation, IoT and consumer …

Demand of MEMS sensor is increasing due to its applicability in various fields such as in
automobile and industrial applications. Save driving is very necessary which can be …