Dislocations in 4H-SiC epilayers for power devices: Identification, formation, and regulation

Y Li, P Hou, S Pan, P Wang, W Cheng, J Wang… - Materials Science in …, 2025 - Elsevier
Abstract 4H-SiC is highly promising for modern electronics, particularly in high-temperature,
high-frequency, and high-power applications. However, the presence of dislocations in 4H …

Investigating Dislocation Arrays Induced by Seed Scratches during PVT 4H-SiC Crystal Growth Using Synchrotron X-Ray Topography

QY Cheng, Y Liu, ZY Chen, S Hu… - Defect and Diffusion …, 2024 - Trans Tech Publ
The influence of seed preparation on crystal defect generation is studied by investigating the
effect of damage from surface scratches not completely removed during polishing on the …

X-Ray Topography Characterization of SiC Crystals Aided by Ray Tracing Simulations

B Raghothamachar, QY Cheng, ZY Chen… - Scientific Books of …, 2024 - Trans Tech Publ
X-ray topography, particularly using synchrotron radiation has been key in characterizing
and analyzing defect behavior in silicon carbide crystals from bulk growth through epilayer …