The microwave cutoff probe (CP) is an accurate diagnostic technique to measure absolute
electron density even in processing gas plasmas. Because this technique needs the …

We investigated the effect of the sheath around the probe tips on the transmission spectrum
of a cutoff probe using an electromagnetic simulation and a circuit model. Our results show …

The previously proposed circuit model has proven to be a powerful tool to analyze and
improve the characteristics of the cutoff probe. This model revealed the mechanism of …

We investigated the formation mechanism of transmission microwave frequency (TMF)
spectrum of cut-off probe using a simple circuit model to elucidate the physics behind the …

The wave cutoff probe, a precise measurement method for measuring the electron density,
was recently proposed. To characterize the cutoff probe system, in this paper, the microwave …

This paper proposes a new measurement method of electron density using the reactance
spectrum of the plasma in the cutoff probe system instead of the transmission spectrum. The …

To analyze the sheath width effect on the determination of the plasma frequency in the cutoff
probe, two simulations (a simplified circuit simulation and an E/M simulation) were …

A method for precise measurement of absolute electron density in the plasma using plasma
frequency is proposed. The phase difference between two antennas (radiating and detecting …

Since the recent advent of serious problems in the plasma fabrication processes (bowing,
faceting, notching, and twisting) is related to the polymer control issue. The polymer control …

A method for the measurements of electron temperature in the plasma using cutoff frequency
and surface wave absorption frequency is described. The cutoff frequency, which gives …