Ultrathin Serpentine Insulation Layer Architecture for Ultralow Power Gas Sensor

SH Kim, MS Jo, KW Choi, JY Yoo, BJ Kim, JS Yang… - Small, 2024 - Wiley Online Library
Toxic gases have surreptitiously influenced the health and environment of contemporary
society with their odorless/colorless characteristics. As a result, a pressing need for reliable …

Fast-Response and Low-Power Self-Heating Gas Sensor Using Metal/Metal Oxide/Metal (MMOM) Structured Nanowires

MS Jo, SH Kim, SY Park, KW Choi, SH Kim, JY Yoo… - ACS …, 2024 - ACS Publications
With the escalating global awareness of air quality management, the need for continuous
and reliable monitoring of toxic gases by using low-power operating systems has become …

System-on-chip SMO gas sensor integration in advanced CMOS technology

L Filipovic, A Lahlalia - Journal of The Electrochemical Society, 2018 - iopscience.iop.org
The growing demand for the integration of functionalities on a single device is peaking with
the rise of IoT. We are near to having multiple sensors in portable and wearable …

Development of micro-hotplate and its reliability for gas sensing applications

M Prasad, PS Dutta - Applied Physics A, 2018 - Springer
This paper presents the development of a double spiral micro-heater and its reliability
testing for gas sensing applications. The design and simulation of the micro-hotplate was …

Thermally/mechanically robust anodic aluminum oxide (AAO) microheater platform for low power chemoresistive gas sensor

B Lee, I Cho, M Kang, D Yang… - Journal of Micromechanics …, 2023 - iopscience.iop.org
The semiconductor metal oxide gas sensors are getting high attention owing to their high
sensitivities and fast responses. They require high temperature for the reaction with target …

Improved sensing capability of integrated semiconducting metal oxide gas sensor devices

A Lahlalia, O Le Neel, R Shankar, S Selberherr… - Sensors, 2019 - mdpi.com
Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and
characterized in terms of their sensing capability and the thermo-mechanical behavior of the …

Perfectly aligned, air‐suspended nanowire array heater and its application in an always‐on gas sensor

KW Choi, MS Jo, JS Lee, JY Yoo… - Advanced Functional …, 2020 - Wiley Online Library
In spite of the excellent thermal properties of nanowires, the typical form factor of unrefined
nanowires has restricted their potential use in developing ultralow power electrothermal …

[HTML][HTML] Electrohydrodynamic inkjet printing of Pd loaded SnO2 nanofibers on a CMOS micro hotplate for low power H2 detection

H Wu, J Yu, R Cao, Y Yang, Z Tang - AIP Advances, 2018 - pubs.aip.org
A high-performance low-power micro hotplate (MHP) hydrogen sensor was fabricated
through electrohydrodynamic (EHD) inkjet printing technique. Electrospun Pd loaded SnO 2 …

Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film

Q Liu, G Ding, Y Wang, J Yao - Micromachines, 2018 - mdpi.com
In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam
structure and reticular structure are designed. These designs have a reliable mechanical …

[HTML][HTML] Comparative study of titanium, platinum, and titanium nitride thin films for micro-elecrto mechanical systems (MEMS) based micro-heaters

S Singh, A Jejusaria, J Singh, M Vashishath, D Kumar - AIP Advances, 2022 - pubs.aip.org
This paper presents a comparative study of titanium (Ti), platinum (Pt), and titanium nitride
(TiN) micro-electro mechanical systems based micro-heaters. In the present study, a …