A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray
P Szypryt, N Nakamura, DT Becker… - IEEE Transactions …, 2023 - ieeexplore.ieee.org
We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer
implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a …
implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a …
A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions
We show three-dimensional reconstructions of a region of an integrated circuit from a 130
nm copper process. The reconstructions employ x-ray computed tomography, measured …
nm copper process. The reconstructions employ x-ray computed tomography, measured …
Laboratory High-Contrast X-ray Microscopy of Copper Nanostructures Enabled by a Liquid-Metal-Jet X-ray Source
K Kutukova, B Lechowski, J Grenzer, P Krueger… - Nanomaterials, 2024 - mdpi.com
High-resolution imaging of Cu/low-k on-chip interconnect stacks in advanced
microelectronic products is demonstrated using full-field transmission X-ray microscopy …
microelectronic products is demonstrated using full-field transmission X-ray microscopy …
Nanoscale X-ray Tomography of Integrated Circuits using a Hybrid Electron/X-ray Microscope: Results and Prospects
Accurate characterization of subsurface features in integrated circuits (ICs) is essential for
defect detection, quality assurance, and supply chain security. The interiors of ICs are …
defect detection, quality assurance, and supply chain security. The interiors of ICs are …