Multidiscipline applications of triboelectric nanogenerators for the intelligent era of internet of things
In the era of 5G and the Internet of things (IoTs), various human–computer interaction
systems based on the integration of triboelectric nanogenerators (TENGs) and IoTs …
systems based on the integration of triboelectric nanogenerators (TENGs) and IoTs …
CMOS-integrated aluminum nitride MEMS: A review
RMR Pinto, V Gund, RA Dias… - Journal of …, 2022 - ieeexplore.ieee.org
Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
Speaking without vocal folds using a machine-learning-assisted wearable sensing-actuation system
Z Che, X Wan, J Xu, C Duan, T Zheng… - Nature Communications, 2024 - nature.com
Voice disorders resulting from various pathological vocal fold conditions or postoperative
recovery of laryngeal cancer surgeries, are common causes of dysphonia. Here, we present …
recovery of laryngeal cancer surgeries, are common causes of dysphonia. Here, we present …
Biomimetic and flexible piezoelectric mobile acoustic sensors with multiresonant ultrathin structures for machine learning biometrics
Flexible resonant acoustic sensors have attracted substantial attention as an essential
component for intuitive human-machine interaction (HMI) in the future voice user interface …
component for intuitive human-machine interaction (HMI) in the future voice user interface …
MEMS piezoelectric sensor for self-powered devices: A review
M Sawane, M Prasad - Materials Science in Semiconductor Processing, 2023 - Elsevier
The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …
caused by the replacement of old batteries, hinder the ability of low-powered electronic …
Piezoelectric micromachined ultrasound transducer technology: recent advances and applications
The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …
Interface induced high-performance piezoelectric nanogenerator based on a electrospun three-phase composite nanofiber for wearable applications
SP Muduli, S Veeralingam… - ACS Applied Energy …, 2021 - ACS Publications
Polymer based composites are the backbone of piezoelectric flexible devices, but the use of
toxic compounds or requirement of high voltage poling are the Achilles' heel of this field …
toxic compounds or requirement of high voltage poling are the Achilles' heel of this field …
A review of piezoelectric MEMS sensors and actuators for gas detection application
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
Vertical etching of scandium aluminum nitride thin films using TMAH solution
A wide bandgap, an enhanced piezoelectric coefficient, and low dielectric permittivity are
some of the outstanding properties that have made Sc x Al 1− x N a promising material in …
some of the outstanding properties that have made Sc x Al 1− x N a promising material in …
Wearable multifunctional piezoelectric MEMS device for motion monitoring, health warning, and earphone
Q Wang, T Ruan, Q Xu, B Yang, J Liu - Nano Energy, 2021 - Elsevier
To solve the problem of a single function encountered by wearable electronic devices, a
multifunctional wearable piezoelectric MEMS device is presented, which performs motion …
multifunctional wearable piezoelectric MEMS device is presented, which performs motion …