Large-area thermoelectric high-aspect-ratio nanostructures by atomic layer deposition
M Ruoho, T Juntunen, I Tittonen - Nanotechnology, 2016 - iopscience.iop.org
We report on the thermoelectric properties of large-area high-aspect-ratio nanostructures.
We fabricate the structures by atomic layer deposition of conformal ZnO thin films on track …
We fabricate the structures by atomic layer deposition of conformal ZnO thin films on track …
Wafer level high-density trench capacitors by using a two-step trench-filling process
T Zheng, G Xu, L Luo - Microsystem Technologies, 2017 - Springer
This paper reports on the design, fabrication and electrical characterization of high-density
SIS trench capacitors by using a two-step deposition process for fast-filling the deep …
SIS trench capacitors by using a two-step deposition process for fast-filling the deep …