The influence of phase difference on the effect of multi-beam interference processing
C Wang, Y Li, Y Yang, Z Chen, Y Zhang - Optik, 2021 - Elsevier
The influence of phase difference in laser interference lithography system is often ignored by
researchers. In this paper, we simulated the interference process of dual-beam, three-beam …
researchers. In this paper, we simulated the interference process of dual-beam, three-beam …