MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

Recent decades have witnessed unprecedented development in the field of biomedical and
chemical science due to an economical, precise, and sensitive microelectromechanical …

According to their inherent characteristics, MEMS resonant accelerometers are suitable for
low-frequency, low-g acceleration measurement. In this paper, we report a MEMS …

Liquid metal (LM) as the universal artificial biomimetic sensory material has attracted much
interest in academic and industrial applications, such as soft robots, flexible electronics, and …

Tilt sensors have been widely used in many applications, such as instrumentation leveling,
oil drilling and structural health monitoring. With the rapid development of the micro …

A review of various kinds of solid tilts sensors, using a free mechanical member for
generation of electric-contact (mostly a ball), is presented. Standard and original solutions …

This paper reports an electromagnetic oscillation flexible printed circuit board (FPCB)
micromirror based scanning triangulation laser rangefinder (LRF). The FPCB micromirror …

The precision of two-dimensional angular sensing is crucial for applications such as
navigation, robotics, and optical alignment. Conventional methods often struggle to balance …

A multimode interference (MMI) fiber optics angle sensor based on a cyclic transparent
amorphous fluoropolymer (CYTOP) multimode fiber is reported Two silica single-mode …

A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the
maximum sensitivity on a set of predefined constraints: small footprint of 500 μm× 500 μm …