This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

Microelectromechanical systems (MEMS) are evolving into highly integrated technologies
for a variety of application areas. Add the biological dimension to the mix and a host of new …

This paper demonstrates the versatile application potential of SU8 photoepoxy for
micromechanical components. Its outstanding aspect ratio and attainable film thicknesses …

SU-8 is a negative, epoxy type, near-UV photoresist. This resist has been specifically
developed for ultrathick, high-aspect-ratio MEMS-type applications using standard …

We report on the versatile application potential of SU8 photoepoxy for movable
micromechanical components. Its outstanding resolution, aspect ratio, and attainable film …

We have successfully developed a new method to release SU-8 structures with polystyrene
as a sacrificial material. Toluene is initially used to dissolve solid polystyrene, and the …

This paper reports on the photocuring kinetics of protonic‐acid‐initiated cationic
polymerizations of UV‐curable epoxy‐based SU8‐negative photoresist systems with and …

In this work, we explored the possibility to develop a microboat for potentially transporting
desired targets in microfluidic systems. We studied its design, fabrication, actuation and …

A method to determine Poisson's ratio of thin films employing a simple experimental
deflection test and a simulation program has been developed. According to the method …

A composite photoresist has been developed for the direct photopatterning of electrodes
useful as biochip substrates. The material is composed of SU-8 polymer added with graphite …