[HTML][HTML] β-Ga2O3 Schottky barrier diodes with 4.1 MV/cm field strength by deep plasma etching field-termination

S Dhara, NK Kalarickal, A Dheenan, C Joishi… - Applied Physics …, 2022 - pubs.aip.org
In this work, we demonstrate a deep mesa etch design for efficient edge field termination in β-
Ga 2 O 3 Schottky barrier diodes (SBDs). The proposed design enabled parallel plate fields …

Robust avalanche in 1.7 kV vertical GaN diodes with a single-implant bevel edge termination

M Xiao, Y Wang, R Zhang, Q Song… - IEEE Electron …, 2023 - ieeexplore.ieee.org
This work demonstrates a novel junction termination extension (JTE) with a graded charge
profile for vertical GaN pn diodes. The fabrication of this JTE obviates GaN etch and requires …

From wide to ultrawide-bandgap semiconductors for high power and high frequency electronic devices

K Woo, Z Bian, M Noshin, RP Martinez… - Journal of Physics …, 2024 - iopscience.iop.org
Wide and ultrawide-bandgap (U/WBG) materials have garnered significant attention within
the semiconductor device community due to their potential to enhance device performance …

Mg-implanted vertical GaN junction barrier Schottky rectifiers with low on resistance, low turn-on voltage, and nearly ideal nondestructive breakdown voltage

M Matys, K Kitagawa, T Narita, T Uesugi, J Suda… - Applied Physics …, 2022 - pubs.aip.org
Vertical GaN junction barrier Schottky (JBS) diodes with superior electrical characteristics
and nondestructive breakdown were realized using selective-area p-type doping via Mg ion …

[HTML][HTML] Ion-implanted triple-zone graded junction termination extension for vertical GaN pn diodes

Y Duan, J Wang, Z Zhu, G Piao, K Ikenaga… - Applied Physics …, 2023 - pubs.aip.org
We demonstrate an ion-implanted triple-zone junction termination extension (JTE) for
vertical GaN pn diodes. Due to the spatial distribution of fixed charge in the triple-zone JTE …

Implanted guard ring edge termination with avalanche capability for vertical GaN devices

Y Wang, M Porter, M Xiao, A Lu, N Yee… - … on Electron Devices, 2023 - ieeexplore.ieee.org
Edge termination is the key building block in power devices to enable near-ideal, avalanche
breakdown voltage (BV). This work presents the design, fabrication, and physics of a GaN …

1 kV self-aligned vertical GaN superjunction diode

Y Ma, M Porter, Y Qin, J Spencer, Z Du… - IEEE Electron …, 2023 - ieeexplore.ieee.org
This work demonstrates vertical GaN superjunction (SJ) diodes fabricated via a novel self-
aligned process. The SJ comprises n-GaN pillars wrapped by the charge-balanced p-type …

High Breakdown Voltage and High Current Injection Vertical GaN-on-GaN pn Diodes With Extremely Low On-Resistance Fabricated on Ammonothermally Grown Bulk …

A Taube, M Kamiński, J Tarenko… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In this work, we report fabrication and characterization of high breakdown voltage and high
current injection vertical gallium nitride (GaN)-on-GaN pn diodes with an etched mesa …

GaN-on-Si quasi-vertical pn diode with junction termination extension based on hydrogen plasma treatment and diffusion

X Liu, M Wang, J Wei, CP Wen, B Xie… - … on Electron Devices, 2023 - ieeexplore.ieee.org
Utilizing hydrogen plasma treatment and controlled diffusion, a junction termination
extension (JTE) structure for vertical gallium nitride (GaN) pn diode with gradient hole …

Design and fabrication of vertical GaN junction barrier Schottky rectifiers using Mg ion implantation

M Matys, K Kitagawa, T Narita, T Uesugi… - Japanese Journal of …, 2023 - iopscience.iop.org
In this review, we briefly summarize the major challenges and our recent progress in the
development of GaN Junction Barrier Schottky (JBS) diodes using selective-area p-type …