Predicting thermoelastic damping (TED) is crucial in the design of micro-resonators with
high quality factors. Until now, some analytical models have been developed to evaluate the …

We report the design procedure for an acoustic add-drop filter (ADF) composed of two line-
defect waveguides coupled through a ring resonator cavity (RRC) all based on a phononic …

Formation of allowed and stopped frequency bands of elastic wave propagation in the
periodic media, also known as phononic crystal (PnC), recently has attracted great attention …

An original approach for designing a one dimensional phononic crystal strip with an ultra-
wide band gap is presented. The strip consists of periodic pillars erected on a tailored beam …

A silicon-based cross-like holey phononic crystal (PnC) strip is proposed for the control of
elastic waves in the field of micro-electro-mechanical systems (MEMS). The goal is to obtain …

This paper demonstrates the four fold enhancement in quality factor (Q) of a very high
frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode …

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-
MEMS resonators through an energy-preserving suspended addendum frame structure …

This work is focused on the application of Phononic Crystals to reduce anchor losses of
MEMS contour mode resonators. Anchor losses dominates the losses in these type of …

We systematically demonstrate that one-dimensional phononic crystal (1-D PnC) tethers can
significantly reduce tether loss in micromechanical resonators to a point where the total …

Owning a superior quality factor (Q) helps contribute to the advantages of
microelectromechanical systems (MEMS) resonators due to its impact on the performance of …