With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

Pressure sensors play a vital role in aerospace, automotive, medical, and consumer
electronics. Although microelectromechanical system (MEMS)-based pressure sensors have …

Modern devices based on modular designs require versatile and universal sensor
components which provide an efficient, sensitive, and compact measurement unit. To …

The residual stress introduced in the packaging process of the mode localized MEMS
sensors will shift the eigenfrequencies of their coupled resonator array, thereby affecting the …

High-sensitivity and simple, low-cost readout are desirable features for sensors independent
of the application area. Micro-cantilever sensors use the deflection induced by the analyte …

A high-accuracy differential resonant pressure sensor with two similar resonators is
proposed using the linear fitting method to guarantee its output linearity without polynomial …

In this letter, we report an ultrasensitive pressure sensor based on an integrated circular
piezoelectric microelectromechanical resonator and stainless-steel diaphragm structure …

Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and
other fields due to their advantages of high resolution, precision and anti-interference ability …

The high sensitivity of silicon microcantilever sensors has expanded their use in areas
ranging from gas sensing to bio-medical applications. Photochromic molecules also …

The efficient operation of industrial processes requires the timely and accurate diagnosis of
faults in process equipment, particularly sensors, as acting on faulty measurement data can …