Atomic layer deposition of ZnO: a review
T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …
and more interest in the last 20 years as a potential material for applications such as thin-film …
[HTML][HTML] Atomic layer deposition of doped ZnO films
Z Gao, P Banerjee - Journal of Vacuum Science & Technology A, 2019 - pubs.aip.org
This article reviews the process-structure-property relationship in doped ZnO thin films via
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …
Atomic Layer Engineering of Aluminum‐Doped Zinc Oxide Films for Efficient and Stable Perovskite Solar Cells
J Kruszyńska, J Ostapko, V Ozkaya… - Advanced Materials …, 2022 - Wiley Online Library
Atomic layer deposition (ALD) has been considered as an efficient method to deposit high
quality and uniform thin films of various electron transport materials for perovskite solar cells …
quality and uniform thin films of various electron transport materials for perovskite solar cells …
New efficient solar cell structures based on zinc oxide nanorods
R Pietruszka, BS Witkowski, S Gieraltowska… - Solar Energy Materials …, 2015 - Elsevier
In this paper, cheap and efficient photovoltaic cells based on ZnO/Si heterostructure are
discussed. These cells contain zinc oxide nanorods (ZnO NR) grown by a low temperature …
discussed. These cells contain zinc oxide nanorods (ZnO NR) grown by a low temperature …
Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition
Abstract Deposition of Al-doped ZnO (AZO) and Al/F co-doped ZnO (FAZO) thin films in an
ALD “batch-type” reactor at temperature of 200° C was presented. AZO films with various Al …
ALD “batch-type” reactor at temperature of 200° C was presented. AZO films with various Al …
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
Application properties of ZnO and AZO thin films obtained by the ALD method
B Swatowska, W Powroźnik, H Czternastek… - Energies, 2021 - mdpi.com
The thin layers of ZnO and ZnO: Al (Al doped zinc oxide—AZO) were deposited by the
atomic deposition layer (ALD) method on silicon and glass substrates. The structures were …
atomic deposition layer (ALD) method on silicon and glass substrates. The structures were …
Highly conductive and transparent hybrid organic–inorganic zincone thin films using atomic and molecular layer deposition
B Yoon, BH Lee, SM George - The Journal of Physical Chemistry …, 2012 - ACS Publications
Highly conducting and transparent hybrid organic–inorganic thin films were grown using
atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The …
atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The …
ZnO/Si heterojunction solar cell fabricated by atomic layer deposition and hydrothermal methods
Currently, the first generation of silicon solar cells is dominating the photovoltaic market.
Silicon cells are produced by various methods, which employ either crystalline or multi …
Silicon cells are produced by various methods, which employ either crystalline or multi …
Inorganic photovoltaics–planar and nanostructured devices
J Ramanujam, A Verma, B González-Díaz… - Progress in Materials …, 2016 - Elsevier
Since its invention in the 1950s, semiconductor solar cell technology has evolved in great
leaps and bounds. Solar power is now being considered as a serious leading contender for …
leaps and bounds. Solar power is now being considered as a serious leading contender for …