This paper attempts to present a comprehensive review of adhesion and locomotion
technology for exploring small celestial bodies (SCBs). The long-term landing, adhesion …

This paper presents a proof-of-concept design of an inchworm-type piezoelectric actuator of
large displacement and force (or power) for shape control and vibration control of adaptive …

Design for miniaturisation represents a broad research topic with applications in
fundamental physics, chemistry, martial science, computing methods, ultra-precision …

This paper describes the development of the nonresonant ultrasonic motor (NRUSM)
applied to a 300-mm-stroke ultra-precision stage for future LSI manufacturing, in particular …

A linear inchworm motor was developed for structural shape control applications. One
motivation for this development was the desire for higher speed alternatives to shape …

A novel proof-of-concept prototype Mesoscale Actuator Device (MAD) containing microscale
components has been developed. The MAD is similar to piezoelectrically driven inchworm …

In this paper, the dynamic model of the prototyped piezoelectric ceramic (PZT) linear
actuator is established and optimized to obtain optimal performance. The PZT linear actuator …

This paper presents the design, analysis and fabrication of a piezoelectric multi-axis stage
based on a new stick-and-clamping actuation technology for miniaturized machine tool …

Having benefited from technological developments, such as surface micromachining, high-
aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal …

A novel proof-of-concept prototype Mesoscale Actuator Device (MAD) is described in this
paper. The MAD is similar to piezoelectric driven inchworm motors with the exception that …