An overview of through-silicon-via technology and manufacturing challenges

JP Gambino, SA Adderly, JU Knickerbocker - Microelectronic Engineering, 2015 - Elsevier
The idea of using through-silicon-via (TSV) technology has been around for many years.
However, this technology has only recently been introduced into high volume …

Extreme ultraviolet lithography and three dimensional integrated circuit—A review

B Wu, A Kumar - Applied Physics Reviews, 2014 - pubs.aip.org
The term 3D IC generally means an IC package having multiple device layers, which is
different with 3D transistor structures such as the FinFET. 3D packaging and 3D integration …

LCHR-TSV: Novel low cost and highly repairable honeycomb-based TSV redundancy architecture for clustered faults

T Ni, Y Yao, H Chang, L Lu, H Liang… - … on Computer-Aided …, 2019 - ieeexplore.ieee.org
Due to the winding level of the thinned wafers and the surface roughness of silicon dies, the
quality of through-silicon vias (TSVs) varies during the fabrication and bonding process. If …

A novel TDMA-based fault tolerance technique for the TSVs in 3D-ICs using honeycomb topology

T Ni, Z Yang, H Chang, X Zhang, L Lu… - IEEE transactions on …, 2020 - ieeexplore.ieee.org
Through-silicon-vias (TSVs) are prone to defects during the manufacturing process, which
pose yield challenges for three dimensional integrated circuits (3D-ICs). The area per TSV is …

Heterogeneous integration supply chain integrity through blockchain and CHSM

PE Calzada, MSUI Sami, KZ Azar, F Rahman… - ACM Transactions on …, 2023 - dl.acm.org
Over the past few decades, electronics have become commonplace in government,
commercial, and social domains. These devices have developed rapidly, as seen in the …

TSV open defects in 3D integrated circuits: Characterization, test, and optimal spare allocation

F Ye, K Chakrabarty - Proceedings of the 49th Annual Design …, 2012 - dl.acm.org
Three-dimensional integration based on die/wafer stacking and through-silicon-vias (TSVs)
promises to overcome interconnect bottlenecks for nanoscale integrated circuits (ICs) …

Pre-bond probing of TSVs in 3D stacked ICs

B Noia, K Chakrabarty - 2011 IEEE International Test …, 2011 - ieeexplore.ieee.org
Through-Silicon Via (TSV)-based 3D stacked ICs (SICs) are becoming increasingly
important in the semiconductor industry, yet pre-bond testing of TSVs continues to be difficult …

Oscillation-based prebond TSV test

LR Huang, SY Huang, S Sunter… - … on Computer-Aided …, 2013 - ieeexplore.ieee.org
Testing the quality of prebond through-silicon vias (TSV) is a vital part of the Known-Good-
Die test that is often necessary to retain a high compound yield for 3-D stacked integrated …

TSV defects and TSV-induced circuit failures: The third dimension in test and design-for-test

K Chakrabarty, S Deutsch… - 2012 IEEE International …, 2012 - ieeexplore.ieee.org
3D integrated circuits (3D ICs) based on through-silicon vias (TSVs) have emerged as a
promising solution for overcoming interconnect and power bottlenecks in IC design …

Pre-bond and post-bond test and signal recovery structure to characterize and repair TSV defect induced signal degradation in 3-D system

M Cho, C Liu, DH Kim, SK Lim… - IEEE Transactions on …, 2011 - ieeexplore.ieee.org
In this paper, we present a methodology for characterization and repair of signal
degradation in through-silicon-vias (TSVs) in 3-D integrated circuits (ICs). The proposed …