An overview of through-silicon-via technology and manufacturing challenges
JP Gambino, SA Adderly, JU Knickerbocker - Microelectronic Engineering, 2015 - Elsevier
The idea of using through-silicon-via (TSV) technology has been around for many years.
However, this technology has only recently been introduced into high volume …
However, this technology has only recently been introduced into high volume …
Extreme ultraviolet lithography and three dimensional integrated circuit—A review
B Wu, A Kumar - Applied Physics Reviews, 2014 - pubs.aip.org
The term 3D IC generally means an IC package having multiple device layers, which is
different with 3D transistor structures such as the FinFET. 3D packaging and 3D integration …
different with 3D transistor structures such as the FinFET. 3D packaging and 3D integration …
LCHR-TSV: Novel low cost and highly repairable honeycomb-based TSV redundancy architecture for clustered faults
Due to the winding level of the thinned wafers and the surface roughness of silicon dies, the
quality of through-silicon vias (TSVs) varies during the fabrication and bonding process. If …
quality of through-silicon vias (TSVs) varies during the fabrication and bonding process. If …
A novel TDMA-based fault tolerance technique for the TSVs in 3D-ICs using honeycomb topology
T Ni, Z Yang, H Chang, X Zhang, L Lu… - IEEE transactions on …, 2020 - ieeexplore.ieee.org
Through-silicon-vias (TSVs) are prone to defects during the manufacturing process, which
pose yield challenges for three dimensional integrated circuits (3D-ICs). The area per TSV is …
pose yield challenges for three dimensional integrated circuits (3D-ICs). The area per TSV is …
Heterogeneous integration supply chain integrity through blockchain and CHSM
Over the past few decades, electronics have become commonplace in government,
commercial, and social domains. These devices have developed rapidly, as seen in the …
commercial, and social domains. These devices have developed rapidly, as seen in the …
TSV open defects in 3D integrated circuits: Characterization, test, and optimal spare allocation
F Ye, K Chakrabarty - Proceedings of the 49th Annual Design …, 2012 - dl.acm.org
Three-dimensional integration based on die/wafer stacking and through-silicon-vias (TSVs)
promises to overcome interconnect bottlenecks for nanoscale integrated circuits (ICs) …
promises to overcome interconnect bottlenecks for nanoscale integrated circuits (ICs) …
Pre-bond probing of TSVs in 3D stacked ICs
B Noia, K Chakrabarty - 2011 IEEE International Test …, 2011 - ieeexplore.ieee.org
Through-Silicon Via (TSV)-based 3D stacked ICs (SICs) are becoming increasingly
important in the semiconductor industry, yet pre-bond testing of TSVs continues to be difficult …
important in the semiconductor industry, yet pre-bond testing of TSVs continues to be difficult …
Oscillation-based prebond TSV test
Testing the quality of prebond through-silicon vias (TSV) is a vital part of the Known-Good-
Die test that is often necessary to retain a high compound yield for 3-D stacked integrated …
Die test that is often necessary to retain a high compound yield for 3-D stacked integrated …
TSV defects and TSV-induced circuit failures: The third dimension in test and design-for-test
K Chakrabarty, S Deutsch… - 2012 IEEE International …, 2012 - ieeexplore.ieee.org
3D integrated circuits (3D ICs) based on through-silicon vias (TSVs) have emerged as a
promising solution for overcoming interconnect and power bottlenecks in IC design …
promising solution for overcoming interconnect and power bottlenecks in IC design …
Pre-bond and post-bond test and signal recovery structure to characterize and repair TSV defect induced signal degradation in 3-D system
In this paper, we present a methodology for characterization and repair of signal
degradation in through-silicon-vias (TSVs) in 3-D integrated circuits (ICs). The proposed …
degradation in through-silicon-vias (TSVs) in 3-D integrated circuits (ICs). The proposed …