Spurred by the invention of the tapping-mode atomic force microscopy three decades ago,
various micromechanical structures and systems that utilize parts with mechanical impact …

CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics
have been shown to yield unique and unprecedented functionalities with on-chip integration …

This paper reports a lithium niobate (LiNbO 3) resonator array that, when used as a passive
voltage amplifier, can produce a passive resonant voltage gain among the highest reported …

We describe an AlN-based resonant switch (resoswitch) for use in a Near-Zero (NZero) RF
Wake-up receiver. A folded beam structure compensates for the curvature caused by the …

A micromechanical CC-beam resonant switch, aka resoswitch, based on a 0.35-μm 2-poly-4-
metal (2P4M) CMOS-MEMS process platform has been demonstrated. In particular, a 2.1 …

We describe an aluminum nitride (AlN)-based resonant switch for use in a near zero power
radio frequency (RF) wake-up receiver. A folded beam structure with a slot compensates for …

In this work, we propose a passive radio frequency (RF) front-end tailored for wake-up
receivers (WuRx) to be deployed in cellular Internet of Things (IoT) devices and wearables …

In this work, we present the first fully-passive RF wake-up receiver (WUR). The WUR relies
on a solid-state envelope detector (ED) and a MEMS-based cantilever switch (RS) acting as …

Residual stress gradients often negatively affect the performance of MEMS devices, causing
film curvature and changing the designed gaps of released structures. In this work, we built …

Micromechanical vibro-impact resonators, for which the devices operate in the highly
nonlinear region where the resonator structures physically impact the output electrodes or …