Silicon MEMS inertial sensors evolution over a quarter century
G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
A review on size‐dependent mechanical properties of nanowires
M Nasr Esfahani, BE Alaca - Advanced Engineering Materials, 2019 - Wiley Online Library
The primary challenge to exploit the nanowire as a truly one‐dimensional building block in
nanoscale devices is the clear incorporation of scale effects into the operational …
nanoscale devices is the clear incorporation of scale effects into the operational …
1.3 mm2 Nav-Grade NEMS-Based Gyroscope
The research reports the design and experimental results of novel gyroscopes based on
nano-resistive sensing, capable to meet navigation grade specifications within a sensor …
nano-resistive sensing, capable to meet navigation grade specifications within a sensor …
Simplified top-down fabrication of sub-micron silicon nanowires
SZ Pakzad, S Akinci… - Semiconductor …, 2023 - iopscience.iop.org
Silicon nanowires are among the most promising nanotechnology building blocks in
innovative devices with numerous applications as nanoelectromechanical systems …
innovative devices with numerous applications as nanoelectromechanical systems …
The first 3D-printed and wet-metallized three-axis accelerometer with differential capacitive sensing
In this paper, the innovative fabrication process for electro-mechanical sensors, born from
the smart combination of 3D-printing and wet-metallization and previously demonstrated in a …
the smart combination of 3D-printing and wet-metallization and previously demonstrated in a …
In-plane and out-of-plane MEMS gyroscopes based on piezoresistive NEMS detection
S Dellea, F Giacci, AF Longoni… - Journal of …, 2015 - ieeexplore.ieee.org
This paper presents a new design and a complete characterization of amplitude-modulation
gyroscopes based on piezoresistive nanogauges. The working principle and optimization …
gyroscopes based on piezoresistive nanogauges. The working principle and optimization …
3D magnetic field sensor concept for use in inertial measurement units (IMUs)
D Ettelt, P Rey, G Jourdan, A Walther… - Journal of …, 2013 - ieeexplore.ieee.org
We report on the design, fabrication, and characterization of a microfabricated 3D magnetic
field sensor that is suitable for co-integration with inertial sensors to form single-chip inertial …
field sensor that is suitable for co-integration with inertial sensors to form single-chip inertial …
The first 3-D-printed z-axis accelerometers with differential capacitive sensing
In this paper, additive manufacturing and wet metallization process are combined to
fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart …
fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart …
MEMS gyroscopes based on piezoresistive NEMS detection of drive and sense motion
S Dellea, P Rey, G Langfelder - Journal of …, 2017 - ieeexplore.ieee.org
This paper presents yaw and pitch microelectromechanical system gyroscopes embedding
four active nanoelectromechanical (NEMS) piezoresistive gauges each, two of which are …
four active nanoelectromechanical (NEMS) piezoresistive gauges each, two of which are …
Tensile strength of silicon nanowires batch-fabricated into electrostatic MEMS testing device
Featured Application Piezoresistive sensors, Torsional mirrors. Abstract The tensile strength
of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based …
of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based …