Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

The primary challenge to exploit the nanowire as a truly one‐dimensional building block in
nanoscale devices is the clear incorporation of scale effects into the operational …

The research reports the design and experimental results of novel gyroscopes based on
nano-resistive sensing, capable to meet navigation grade specifications within a sensor …

Silicon nanowires are among the most promising nanotechnology building blocks in
innovative devices with numerous applications as nanoelectromechanical systems …

In this paper, the innovative fabrication process for electro-mechanical sensors, born from
the smart combination of 3D-printing and wet-metallization and previously demonstrated in a …

This paper presents a new design and a complete characterization of amplitude-modulation
gyroscopes based on piezoresistive nanogauges. The working principle and optimization …

We report on the design, fabrication, and characterization of a microfabricated 3D magnetic
field sensor that is suitable for co-integration with inertial sensors to form single-chip inertial …

In this paper, additive manufacturing and wet metallization process are combined to
fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart …

This paper presents yaw and pitch microelectromechanical system gyroscopes embedding
four active nanoelectromechanical (NEMS) piezoresistive gauges each, two of which are …

Featured Application Piezoresistive sensors, Torsional mirrors. Abstract The tensile strength
of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based …