Robust edge coupling probe applied in wafer-level optical testing
SH Huang, CY Lin, YK Fu, SY Mu, MJ Lu… - 2023 IEEE 73rd …, 2023 - ieeexplore.ieee.org
In this paper, we propose a wafer-level optical testing technique for measuring edge
couplers and design a robust edge coupling probe to apply in this work. The probe provides …
couplers and design a robust edge coupling probe to apply in this work. The probe provides …