Anodized porous silicon based humidity sensor: evaluation of material characteristics and sensor performance of AU/PSIO2/AU

WNS Wan Ahmad Aziz, R Abdul Rani… - Journal of Porous …, 2024 - Springer
Porous silicon (PSi) has received a lot of attention in nanotechnology research in recent
years for its potential use as sensing layers in sensor application. However, there have been …

Geometrical model for the growth mechanism of si nanopores

IE Santizo, IL Garzón - Silicon, 2022 - Springer
The importance of silicon nanopore fabrication lies, in part, on being a high demand
emergent technology to make ultrafast DNA sequencing. Other important applications …

Porous Si (111) fabrication using electrochemical anodization: effects of electrode distance and current density

R Suryana, FA Bogas, K Triyana… - Jurnal Teori dan …, 2021 - jtaf.fmipa.unila.ac.id
Porous silicon (PSi) has developed for many applications such as gas and humidity sensors.
Various methods are available to fabricate PSi, and electrochemical anodization is common …

Annealing effect on ultraviolet sensor performance with porous silicon based

MZM Yusoff, RA Rani, IA Zakaria… - 2022 IEEE …, 2022 - ieeexplore.ieee.org
Nowadays, most semiconductor industries apply silicon-based material in developing
advanced electronic device. Concerns with heat management of electronic devices which …

Formation of porous silicon on N-type Si (1 0 0) and Si (1 1 1) substrates by electrochemical anodization method

B Pratama, I Syahidi, E Prayogo, K Triyana… - Materials Today …, 2021 - Elsevier
Porous silicon (PSi) was formed on n-type Si (1 0 0) and Si (1 1 1) substrates via the
electrochemical anodization method. The samples were anodized in HF: ethanol solution (1 …

Analysis of Porous Silicon Formation on N-type Si (100) using Laser-Assisted Electrochemical Anodization Method

R Suryana, NQ Aini - Journal of Physics and its Applications, 2022 - ejournal2.undip.ac.id
Porous silicon (PSi) was formed on n-type Si (100) substrates using the laser-assisted
electrochemical anodization method. The silicon surface was anodized in the solution of HF …

Identifying the Performance of Porous Silicon Based Humidity Sensors at Different Gold Contact Pad Spacings

WNSWA Aziz, RA Rani, NLS Ngadiman… - 2023 IEEE 14th …, 2023 - ieeexplore.ieee.org
In recent years, porous silicon (PSi) substrate has been broadly studied by other
researchers for microelectronics development due to its viable physical and chemical …

Effect of HF and Ethanol Volume Ratio on Porous Silicon Formed by Photoelectrochemical Method on N-type Si (100) Substrates

R Suryana, NA Aini, M Diantorom - 2024 - catalog.lib.kyushu-u.ac.jp
The photoelectrochemical method using a green laser has been employed in forming PSi on
n-type Si (100) surfaces. The volume ratio of HF and ethanol was varied at 1: 1, 1: 3, and 3: 1 …

Optical absorbance of porous silicon on n-type Si (111) surfaces fabricated by electrochemical anodization method

M Handayani, R Suryana - Materials Today: Proceedings, 2019 - Elsevier
Abstract Porous silicon (PSi) on Si (111) surface has been fabricated by electrochemical
anodization method. Si surface was anodized in HF and ethanol solution. Anodization time …

The Formation of Porous Silicon Using Vertical Photoelectrochemical Method with Laser Energy Variation

R Suryana, TAZ Setyorini… - Diffusion Foundations and …, 2024 - Trans Tech Publ
Due to its notable characteristics, porous silicon (PSi) has become the main focus in silicon
upgrades for optoelectronics, medical, and sensor applications. Here, successful vertical …