Anodized porous silicon based humidity sensor: evaluation of material characteristics and sensor performance of AU/PSIO2/AU
WNS Wan Ahmad Aziz, R Abdul Rani… - Journal of Porous …, 2024 - Springer
Porous silicon (PSi) has received a lot of attention in nanotechnology research in recent
years for its potential use as sensing layers in sensor application. However, there have been …
years for its potential use as sensing layers in sensor application. However, there have been …
Geometrical model for the growth mechanism of si nanopores
IE Santizo, IL Garzón - Silicon, 2022 - Springer
The importance of silicon nanopore fabrication lies, in part, on being a high demand
emergent technology to make ultrafast DNA sequencing. Other important applications …
emergent technology to make ultrafast DNA sequencing. Other important applications …
Porous Si (111) fabrication using electrochemical anodization: effects of electrode distance and current density
Porous silicon (PSi) has developed for many applications such as gas and humidity sensors.
Various methods are available to fabricate PSi, and electrochemical anodization is common …
Various methods are available to fabricate PSi, and electrochemical anodization is common …
Annealing effect on ultraviolet sensor performance with porous silicon based
MZM Yusoff, RA Rani, IA Zakaria… - 2022 IEEE …, 2022 - ieeexplore.ieee.org
Nowadays, most semiconductor industries apply silicon-based material in developing
advanced electronic device. Concerns with heat management of electronic devices which …
advanced electronic device. Concerns with heat management of electronic devices which …
Formation of porous silicon on N-type Si (1 0 0) and Si (1 1 1) substrates by electrochemical anodization method
B Pratama, I Syahidi, E Prayogo, K Triyana… - Materials Today …, 2021 - Elsevier
Porous silicon (PSi) was formed on n-type Si (1 0 0) and Si (1 1 1) substrates via the
electrochemical anodization method. The samples were anodized in HF: ethanol solution (1 …
electrochemical anodization method. The samples were anodized in HF: ethanol solution (1 …
Analysis of Porous Silicon Formation on N-type Si (100) using Laser-Assisted Electrochemical Anodization Method
R Suryana, NQ Aini - Journal of Physics and its Applications, 2022 - ejournal2.undip.ac.id
Porous silicon (PSi) was formed on n-type Si (100) substrates using the laser-assisted
electrochemical anodization method. The silicon surface was anodized in the solution of HF …
electrochemical anodization method. The silicon surface was anodized in the solution of HF …
Identifying the Performance of Porous Silicon Based Humidity Sensors at Different Gold Contact Pad Spacings
WNSWA Aziz, RA Rani, NLS Ngadiman… - 2023 IEEE 14th …, 2023 - ieeexplore.ieee.org
In recent years, porous silicon (PSi) substrate has been broadly studied by other
researchers for microelectronics development due to its viable physical and chemical …
researchers for microelectronics development due to its viable physical and chemical …
Effect of HF and Ethanol Volume Ratio on Porous Silicon Formed by Photoelectrochemical Method on N-type Si (100) Substrates
R Suryana, NA Aini, M Diantorom - 2024 - catalog.lib.kyushu-u.ac.jp
The photoelectrochemical method using a green laser has been employed in forming PSi on
n-type Si (100) surfaces. The volume ratio of HF and ethanol was varied at 1: 1, 1: 3, and 3: 1 …
n-type Si (100) surfaces. The volume ratio of HF and ethanol was varied at 1: 1, 1: 3, and 3: 1 …
Optical absorbance of porous silicon on n-type Si (111) surfaces fabricated by electrochemical anodization method
M Handayani, R Suryana - Materials Today: Proceedings, 2019 - Elsevier
Abstract Porous silicon (PSi) on Si (111) surface has been fabricated by electrochemical
anodization method. Si surface was anodized in HF and ethanol solution. Anodization time …
anodization method. Si surface was anodized in HF and ethanol solution. Anodization time …
The Formation of Porous Silicon Using Vertical Photoelectrochemical Method with Laser Energy Variation
R Suryana, TAZ Setyorini… - Diffusion Foundations and …, 2024 - Trans Tech Publ
Due to its notable characteristics, porous silicon (PSi) has become the main focus in silicon
upgrades for optoelectronics, medical, and sensor applications. Here, successful vertical …
upgrades for optoelectronics, medical, and sensor applications. Here, successful vertical …