Optical properties of Al-doped ZnO thin films obtained by the method of high-frequency magnetron sputtering

A Kashuba, H Ilchuk, R Petrus, I Semkiv… - … Physics Letters B, 2021 - World Scientific
The optical constants and thickness of Al-doped ZnO (ZnO: Al (2.5 wt.%)) thin films prepared
by high-frequency magnetron sputtering method are determined. ZnO: Al thin films are …

Growth, crystal structure and optical properties of Al-doped ZnO thin films

A Kashuba, H Ilchuk, R Petrus… - … Crystals and Liquid …, 2021 - Taylor & Francis
Abstract Al-doped ZnO (ZnO: Al) thin films are prepared by high-frequency magnetron
sputtering method. The phase analysis and crystal structure refinement are performed using …

Optical and Dispersion Parameters of the Al-doped ZnO Thin Film

AI Kashuba, B Andriyevsky, HA Ilchuk, RY Petrus… - 2021 - essuir.sumdu.edu.ua
The results of studies of the dispersion of optical functions and optical constants for zinc
oxide thin film doped with aluminum are presented. The deposition of Al-doped ZnO (2.5 …